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1. WO2020246697 - SUBSTRATE FOR SOLAR CELL, SOLAR CELL, AND SOLAR CELL MANUFACTURING METHOD

Publication Number WO/2020/246697
Publication Date 10.12.2020
International Application No. PCT/KR2020/004683
International Filing Date 07.04.2020
IPC
H01L 31/18 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/0445 2014.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
04adapted as photovoltaic conversion devices
042PV modules or arrays of single PV cells
0445including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
H01L 21/306 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18the devices having semiconductor bodies comprising elements of group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
302to change the physical characteristics of their surfaces, or to change their shape, e.g. etching, polishing, cutting
306Chemical or electrical treatment, e.g. electrolytic etching
H01L 21/56 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/06-H01L21/326162
56Encapsulations, e.g. encapsulating layers, coatings
H01L 21/78 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
78with subsequent division of the substrate into plural individual devices
H01L 21/76 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
71Manufacture of specific parts of devices defined in group H01L21/7086
76Making of isolation regions between components
CPC
Y02E 10/50
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
10Energy generation through renewable energy sources
50Photovoltaic [PV] energy
Applicants
  • 주성엔지니어링(주) JUSUNG ENGINEERING CO., LTD. [KR]/[KR]
Inventors
  • 김정배 KIM, Jung Bae
  • 강준영 KANG, Jun Young
  • 문향주 MUN, Hyang Ju
  • 민선기 MIN, Seon Ki
  • 서정호 SEO, Jeong Ho
  • 신원석 SHIN, Won Suk
  • 신현교 SHIN, Hyun Kyo
  • 윤영태 YOON, Young Tae
  • 임경진 LIM, Kyoung Jin
Agents
  • 특허법인 천문 ASTRAN INT'L IP GROUP
Priority Data
10-2019-006582904.06.2019KR
10-2019-012038430.09.2019KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) SUBSTRATE FOR SOLAR CELL, SOLAR CELL, AND SOLAR CELL MANUFACTURING METHOD
(FR) SUBSTRAT POUR CELLULE SOLAIRE, CELLULE SOLAIRE, ET PROCÉDÉ DE FABRICATION DE CELLULE SOLAIRE
(KO) 태양전지용 기판, 태양전지, 및 태양전지 제조방법
Abstract
(EN)
The present invention relates to a solar cell manufacturing method, a solar cell manufactured thereby, and a substrate for a solar cell. The solar cell manufacturing method involves forming a separating portion for separating a substrate, which is for manufacturing the solar cell, into a plurality of pieces. The solar cell manufacturing method comprises: a step for preparing the substrate; a first substrate etching step for forming a first groove in one surface of the substrate; a second substrate etching step for forming a second groove inside the first groove; and a third substrate etching step for etching the substrate including the second groove, wherein the separating portion includes the first groove and the second groove.
(FR)
La présente invention concerne un procédé de fabrication de cellule solaire, une cellule solaire fabriquée par celui-ci, et un substrat pour une cellule solaire. Le procédé de fabrication de cellule solaire consiste à former une partie de séparation pour séparer un substrat, qui est destiné à la fabrication de la cellule solaire, en une pluralité de pièces. Le procédé de fabrication de cellule solaire comprend : une étape de préparation du substrat ; une première étape de gravure de substrat pour former une première rainure dans une surface du substrat ; une deuxième étape de gravure de substrat pour former une seconde rainure à l'intérieur de la première rainure ; et une troisième étape de gravure de substrat pour graver le substrat comprenant la seconde rainure, la partie de séparation comprenant la première rainure et la seconde rainure.
(KO)
본 발명은 태양전지 제조를 위한 기판을 복수개의 조각으로 분리하기 위한 분리부를 형성하는 태양전지 제조방법으로서, 상기 기판을 준비하는 공정; 상기 기판의 일면(一面)에 제1홈을 형성하는 제1기판식각공정; 상기 제1홈 내부에 제2홈을 형성하는 제2기판식각공정; 및 상기 제2홈을 포함한 상기 기판을 식각하는 제3기판식각공정을 포함하고, 상기 분리부는 상기 제1홈 및 제2홈을 포함하는 태양전지 제조방법, 이에 의해 제조된 태양전지, 및 태양전지용 기판에 관한 것이다.
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