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1. WO2020243494 - SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES

Publication Number WO/2020/243494
Publication Date 03.12.2020
International Application No. PCT/US2020/035220
International Filing Date 29.05.2020
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
H03L 7/08 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
LAUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
7Automatic control of frequency or phase; Synchronisation
06using a reference signal applied to a frequency- or phase-locked loop
08Details of the phase-locked loop
CPC
H01J 2237/24564
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
245Detection characterised by the variable being measured
24564Measurements of electric or magnetic variables, e.g. voltage, current, frequency
H01J 2237/24592
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
245Detection characterised by the variable being measured
24592Inspection and quality control of devices
H01J 37/32201
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
32201Generating means
H01J 37/32293
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
32293using particular waveforms, e.g. polarised waves
H01J 37/32311
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
32311Circuits specially adapted for controlling the microwave discharge
H01J 37/32798
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32798Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
Applicants
  • MKS INSTRUMENTS, INC. [US]/[US]
Inventors
  • KAMAREHI, Mohammad
  • SHAHEEN, Mohamed
  • TRENHOLM, Kenneth
  • GALLIVAN, Bryan
  • BRAGHIROLI, Francesco
Agents
  • MILLS, Steven
  • PYSHER, Paul
  • CHACLAS, George N.
  • COHEN, Jerry
  • CLARKE, J.D., PH.D., Daniel W.
  • EMMONS, Richard B.
  • COWLES, Christopher R.
  • GOLDMAN, Gabriel
  • JOBSE, Bruce D.
  • MARAIA, Joseph M.
  • MCGRATH, Daniel
  • QUINN, Joseph P.
  • SCHEPPER, Marlo M.
  • SERIO, John C.
  • SORKIN, Paul D.
  • SUSAN, Janine M.
  • FOLEY, Shawn
  • SCHULTZ, Christopher S.
  • KARIMI, Pegah
Priority Data
16/881,39022.05.2020US
16/881,45822.05.2020US
62/855,13631.05.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES
(FR) SYSTÈME ET PROCÉDÉ DE GÉNÉRATION D'ÉNERGIE AVEC MODULES DE GÉNÉRATEUR À SEMI-CONDUCTEURS À LIAISON DE PHASE
Abstract
(EN)
A plasma generation system and method includes connected solid state generator modules. The solid state generators can be connected to a shared reference clock to generator an output, and/or can be combined using a phase optimization technique.
(FR)
L'invention concerne un système et un procédé de génération de plasma comprenant des modules de générateur à semi-conducteurs connectés. Les générateurs à semi-conducteurs peuvent être connectés à une horloge de référence partagée pour générer une sortie, et/ou peuvent être combinés à l'aide d'une technique d'optimisation de phase.
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