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1. WO2020225017 - RETICLE CAGE ACTUATOR WITH SHAPE MEMORY ALLOY AND MAGNETIC COUPLING MECHANISMS

Publication Number WO/2020/225017
Publication Date 12.11.2020
International Application No. PCT/EP2020/061679
International Filing Date 28.04.2020
IPC
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
G03F 7/707
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70691Handling of masks or wafers
707Chucks, e.g. chucking or un-chucking operations
G03F 7/70708
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70691Handling of masks or wafers
707Chucks, e.g. chucking or un-chucking operations
70708being electrostatic; Electrostatically deformable vacuum chucks
G03F 7/70716
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70691Handling of masks or wafers
70716Stages
G03F 7/70983
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
708Construction of apparatus, e.g. environment, hygiene aspects or materials
70983Optical system protection, e.g. pellicles or removable covers for protection of mask
Applicants
  • ASML HOLDING N.V. [NL]/[NL]
Inventors
  • KRISHNAN, Hari
  • DOSHI, Kushal, Sandeep
Agents
  • SLENDERS, Petrus Johannes Waltherus
Priority Data
62/845,02208.05.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) RETICLE CAGE ACTUATOR WITH SHAPE MEMORY ALLOY AND MAGNETIC COUPLING MECHANISMS
(FR) ACTIONNEUR DE CAGE DE RÉTICULE AVEC ALLIAGE À MÉMOIRE DE FORME ET MÉCANISMES DE COUPLAGE MAGNÉTIQUE
Abstract
(EN)
Embodiments herein describe methods and safety devices used to provide support for an object. A safety device includes a driving side comprising a driving motor and a driven side. The driven side of the safety device includes a housing having a rotating shaft extending along a length of the housing and a safety latch. The driven side is coupled to the driving motor via a non-contact, magnetic coupling device at a first end of the rotating shaft, and the safety latch is coupled to a second end of the rotating shaft opposite from the first end of the rotating shaft. The driving motor is configured to cause rotation in a radial direction of the safety latch on the driving side via the non-contact, magnetic coupling device.
(FR)
Des modes de réalisation de la présente invention concernent des procédés et des dispositifs de sécurité utilisés pour fournir un support à un objet. Un dispositif de sécurité comprend un côté d'entraînement comprenant un moteur d'entraînement et un côté entraîné. Le côté entraîné du dispositif de sécurité comprend un boîtier ayant un arbre rotatif s'étendant le long d'une longueur du boîtier et un verrou de sécurité. Le côté entraîné est couplé au moteur d'entraînement au niveau d'une première extrémité de l'arbre rotatif par l'intermédiaire d'un dispositif d'accouplement magnétique sans contact, et le verrou de sécurité est couplé à une seconde extrémité de l'arbre rotatif située à l'opposé de la première extrémité de l'arbre rotatif. Le moteur d'entraînement est conçu pour provoquer une rotation dans une direction radiale du verrou de sécurité sur le côté d'entraînement par l'intermédiaire du dispositif d'accouplement magnétique sans contact.
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