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1. WO2020222764 - GROUND STRAP ASSEMBLIES

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]

What is claimed is:

1. A substrate processing chamber, comprising:

a chamber body, comprising:

one or more chamber walls at least partially defining a process volume; and

a chamber bottom coupled to the one or more chamber walls, the chamber bottom having a chamber connector coupled thereto, the chamber connector further comprising:

a first clamping member coupled to a second clamping member by one or more fasteners;

a substrate support disposed in the process volume, the substrate support having a support connector coupled thereto, the support connector further comprising:

a first clamping member coupled to a second clamping member by one or more fasteners; and

a ground strap having a first end and a second end, the first end coupled to the substrate support at the support connector and the second end coupled to the chamber bottom at the chamber connector, wherein one or more surfaces of the support connector and/or the chamber connector configured to contact the ground strap have a dielectric coating formed thereon.

2. The chamber of claim 1 , wherein the dielectric coating is formed of anodized aluminum.

3. The chamber of claim 1 , wherein the dielectric coating is formed of PTFE.

4. The chamber of claim 1 , wherein the dielectric coating has a thickness between about 10 pm and about 100 pm.

5. The chamber of claim 2, wherein the dielectric coating has a thickness between about 10 pm and about 100 pm.

6. The chamber of claim 1 , wherein the dielectric coating has a surface roughness between about 0 and about 5 urn.

7. The chamber of claim 2, wherein the dielectric coating has a surface roughness between about 0 and about 5 urn.

8. The chamber of claim 1 , wherein the dielectric coating is further formed on one or more surfaces of the support connector and/or the chamber connector not configured to contact the ground strap.

9. A ground strap assembly, comprising:

a chamber connector having a dielectric coating formed on one or more surfaces thereof;

a support connector having a dielectric coating formed on one or more surfaces thereof; and

a ground strap having a first end and a second end, the first end coupled to the support connector and the second end coupled to the chamber connector, wherein the chamber connector and the support connector function as capacitors.

10. The ground strap assembly of claim 9, wherein the support connector and the chamber connector are formed of aluminum.

11. The ground strap assembly of claim 10, wherein the dielectric coating is formed of anodized aluminum.

12. The ground strap assembly of claim 11 , wherein the dielectric coating has a thickness between about 10 pm and about 100 pm.

13. The ground strap assembly of claim 10, wherein the dielectric coating is formed of PTFE.

14. The ground strap assembly of claim 9, wherein each of the chamber connector and the support connector include a first clamping member and a second clamping member coupled together by one or more fasteners.

15. A ground strap assembly, comprising:

a chamber connector;

a support connector; and

a ground strap having a first end and a second end, the first end coupled to the support connector and the second end coupled to the chamber connector, the first and second ends of the ground strap being formed of a dielectric material, wherein the chamber connector and the support connector function as capacitors at the first and second ends.