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1. WO2020220569 - SCANNING ELECTRON MICROSCOPE WITH COMPOSITE DETECTION SYSTEM AND SPECIMEN DETECTION METHOD

Publication Number WO/2020/220569
Publication Date 05.11.2020
International Application No. PCT/CN2019/107106
International Filing Date 20.09.2019
IPC
G01N 23/203 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
20by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
203Measuring back scattering
H01J 37/145 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
10Lenses
145Combinations of electrostatic and magnetic lenses
CPC
G01N 2223/053
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
05by diffraction, scatter or reflection
053back scatter
G01N 2223/054
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
05by diffraction, scatter or reflection
054small angle scatter
G01N 2223/071
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
07secondary emission
071combination of measurements, at least 1 secondary emission
G01N 2223/079
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
07secondary emission
079incident electron beam and measuring excited X-rays
G01N 23/20008
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
20by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
20008Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
G01N 23/201
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
20by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
201by measuring small-angle scattering
Applicants
  • FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD. [CN]/[CN]
Inventors
  • LI, Shuai
Agents
  • CHINA PAT INTELLECTUAL PROPERTY OFFICE
Priority Data
201910507143.412.06.2019CN
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SCANNING ELECTRON MICROSCOPE WITH COMPOSITE DETECTION SYSTEM AND SPECIMEN DETECTION METHOD
(FR) SYSTÈME DE MICROSCOPE ÉLECTRONIQUE À BALAYAGE AYANT UN SYSTÈME DE DÉTECTION COMPOSITE ET PROCÉDÉ DE DÉTECTION D'ÉCHANTILLON
Abstract
(EN)
A scanning electron microscope with a composite detection system and a specimen detection method. The scanning electron microscope includes a composite objective lens system including an immersion magnetic lens and an electro lens, configured to focus an initial electron beam to a specimen to form a convergent beam spot; a composite detection system located in the composite objective lens system; and a detection signal amplification and analysis system. A magnetic field of the immersion magnetic lens is immersed in the specimen; the electro lens is configured to decelerate the initial electron beam and focus the initial electron beam onto the specimen, and separate BSEs from a transmission path of an X-ray; the composite detection system is located below an inner pole piece of the immersion magnetic lens, is located above the control electrode, and includes an annular BSE detector and an annular X-ray detector that have a same axis center.
(FR)
L'invention concerne un microscope électronique à balayage doté d'un système de détection composite et un procédé de détection d'échantillon. Le microscope électronique à balayage comprend un système de lentille d'objectif composite comprenant une lentille magnétique d'immersion et une lentille à électrons, configurée pour focaliser un faisceau d'électrons initial sur un spécimen pour former un point de faisceau convergent; un système de détection composite situé dans le système de lentille d'objectif composite; et un système d'amplification de détection et d'analyse. Un champ magnétique de la lentille magnétique à immersion est immergé dans l'échantillon; l'électro-lentille est configurée pour ralentir le faisceau d'électrons initial et focaliser le faisceau d'électrons initial sur l'échantillon, et séparer des BSE d'un trajet de transmission d'un rayon X; le système de détection composite est situé au-dessous d'une pièce polaire interne de la lentille magnétique à immersion, est situé au-dessus de l'électrode de commande, et comprend un détecteur BSE annulaire et un détecteur de rayons X annulaire qui ont un même centre axial.
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