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1. WO2020208085 - PLASMA SOURCE CHAMBER FOR A SPECTROMETER

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]

Claims

1. A plasma source chamber for use in a spectrometer, the plasma source chamber

comprising:

- an inner housing for accommodating a plasma source, and

an outer housing accommodating the inner housing,

wherein the outer housing comprises at least one outer air inlet opening in a first wall and at least one outer air outlet opening in a second wall,

wherein walls of the inner housing and walls of the outer housing define a spacing so as to allow a first air flow from the at least one outer air inlet opening to the at least one outer air outlet opening through the spacing between the inner housing and the outer housing, and

wherein the inner housing comprises at least one inner air inlet opening in a first wall and at least one inner air outlet opening in a second wall to allow a second air flow from the at least one inner air inlet opening to the at least one inner air outlet opening through the inner housing.

2. The plasma source chamber according to claim 1, wherein the walls, the inlets and the outlets are arranged such that in use the first air flow is greater than the second air flow.

3. The plasma source chamber according to claim 1 or 2, wherein the at least one outer air inlet opening and the at least one outer air outlet opening are arranged in opposite walls of the outer housing.

4. The plasma source chamber according to claim 1, 2 or 3, wherein the at least one outer air inlet opening is located, in use, lower than the at least one outer outlet opening.

5. The plasma source chamber according to any of the preceding claims, wherein the at least one outer air outlet opening is larger than the at least one outer air inlet opening.

6. The plasma source chamber according to any of the preceding claims, wherein the at least one outer air inlet opening extends over substantially the width of a wall of the outer housing.

7. The plasma source chamber according to any of the preceding claims, wherein the at least one outer air outlet opening extends over substantially the width of a wall of the outer housing.

8. The plasma source chamber according to any of the preceding claims, wherein the at least one inner air inlet opening and the at least one inner air outlet opening are arranged in opposite walls of the inner housing.

9. The plasma source chamber according to any of the preceding claims, wherein the at least one inner air inlet opening is located, in use, lower than the at least one inner air outlet opening.

10. The plasma source chamber according to any of the preceding claims, wherein the at least one inner air outlet opening is larger than the at least one inner air inlet opening.

11. The plasma source chamber according to any of the preceding claims, wherein the at least one inner air inlet opening extends over substantially the width of a wall of the inner housing.

12. The plasma source chamber according to any of the preceding claims, wherein the at least one inner air outlet opening extends over substantially the width of a wall of the inner housing.

13. The plasma source chamber according to any of the preceding claims, wherein the at least one inner air inlet opening is in direct communication with the spacing between the inner housing and the outer housing.

14. The plasma source chamber according to any of claims 1 to 12, wherein the at least one inner air inlet opening is connected to a duct which extends through the spacing and through a wall of the outer housing so as to allow a flow of air from outside the outer housing.

15. The plasma source chamber according to any of the preceding claims, wherein the at least one inner air outlet opening is in direct communication with the spacing between the inner housing and the outer housing.

16. The plasma source chamber according to any of claims 1 to 14, wherein the at least one inner air outlet opening is connected to a duct which extends through the spacing and through a wall of the outer housing so as to allow a flow of air to the outside of the outer housing.

17. The plasma source chamber according to any of the preceding claims, wherein the inner housing is removable.

18. The plasma source chamber according to any of the preceding claims, further

comprising a shielding element for covering at least one wall of the outer housing, said shielding element and said wall defining a further spacing so as to allow a third flow of air between said shielding element and the outer housing.

19. The plasma source chamber according to claim 18, wherein the shielding element is arranged for covering two substantially perpendicular walls of the outer housing, the further spacing extending between said shielding element and said walls, one of said walls preferably being, in use, a top wall.

20. The plasma source chamber according to any of the preceding claims, wherein the inner housing has at least one further air inlet opening in a wall which is, in use, a bottom wall.

21. The plasma source chamber according to any of the preceding claims, wherein further openings are provided in walls of both the inner housing and outer housing to accommodate a plasma source and at least one periscopic viewing element.

22. The plasma source chamber according to any of the preceding claims, arranged for accommodating a vertical plasma source.

23. The plasma source chamber according to any of claims 1 to 21, arranged for

accommodating a horizontal plasma source.

24. The plasma source chamber according to any of the preceding claims, wherein the

plasma source is an inductively coupled plasma source, a flame source, a microwave- induced plasma source, or an electro-thermo ionization source.

25. The plasma source chamber according to any of the preceding claims, further

comprising an inner door for the inner housing and an outer door for the outer housing.

26. The plasma source chamber according to claim 25, wherein at least one of the inner door and the outer door is a sliding door.

27. The plasma source chamber according to claim 25 or 26, wherein the inner door and the outer door are connected such that opening or closing the outer door also opens or closes the inner door.

28. A spectrometer comprising a plasma source chamber according to any of the preceding claims.

29. The spectrometer according to claim 28, which is:

- an emission spectrometer, such as an optical emission spectrometer or an atomic fluorescence spectrometer, or

an atomic absorption spectrometer, or

a mass spectrometer.

30. The spectrometer according to claim 29, which is a plasma optical emission

spectrometer.