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1. WO2020204394 - MICROELEMENT ADSORPTION PICKER

Publication Number WO/2020/204394
Publication Date 08.10.2020
International Application No. PCT/KR2020/003457
International Filing Date 12.03.2020
IPC
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
Applicants
  • (주)포인트엔지니어링 POINT ENGINEERING CO., LTD. [KR]/[KR]
Inventors
  • 안범모 AHN, Bum Mo
  • 박승호 PARK, Seung Ho
  • 변성현 BYUN, Sung Hyun
Agents
  • 최광석 CHOI, Kwang Seok
Priority Data
10-2019-003657329.03.2019KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) MICROELEMENT ADSORPTION PICKER
(FR) DISPOSITIF DE SAISIE PAR ADSORPTION DE MICROÉLÉMENTS
(KO) 미소 소자 흡착 픽커
Abstract
(EN)
The present invention can provide a microelement adsorption picker characterized by comprising an adsorption portion for adsorbing microelements, wherein the adsorption portion is composed of a porous member.
(FR)
La présente invention peut fournir un dispositif de saisie par adsorption de microéléments caractérisé en ce qu'il comprend une partie d'adsorption pour adsorber des microéléments, la partie d'adsorption étant composée d'un élément poreux.
(KO)
본 발명에 따른 미소 소자를 흡착하는 흡착부를 포함하는 미소 소자 흡착 픽커에 있어서, 상기 흡착부는 다공성 부재로 이루어진 것을 특징으로 하는 미소 소자 흡착 픽커가 제공될 수 있다.
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