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1. WO2020201190 - TESTING DEVICE AND METHOD FOR MEASURING THE HOMOGENEITY OF AN OPTICAL ELEMENT

Publication Number WO/2020/201190
Publication Date 08.10.2020
International Application No. PCT/EP2020/058905
International Filing Date 30.03.2020
IPC
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01M 11/02 2006.01
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
02Testing optical properties
B29D 11/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
G01B 9/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
G01N 21/45 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
41Refractivity; Phase-affecting properties, e.g. optical path length
45using interferometric methods; using Schlieren methods
CPC
B29D 11/0098
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
00951Measuring, controlling or regulating
0098Inspecting lenses
G01B 11/2441
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
2441using interferometry
G01B 9/02039
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02034characterised by particularly shaped beams or wavefronts
02038Shaping the wavefront, e.g. generating a spherical wavefront
02039by matching the wavefront with a particular object surface shape
G01B 9/02057
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
02056Passive error reduction, i.e. not varying during measurement, e.g. by constructional details of optics
02057by using common path configuration, i.e. reference and object path almost entirely overlapping
G01M 11/0271
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
02Testing optical properties
0242by measuring geometrical properties or aberrations
0271by using interferometric methods
G01N 21/45
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
41Refractivity; Phase-affecting properties, e.g. optical path length
45using interferometric methods; using Schlieren methods
Applicants
  • CARL ZEISS MEDITEC AG [DE]/[DE]
Inventors
  • BÖHME, Beate
Agents
  • RÖSSNER, Ulrike
Priority Data
10 2019 204 578.201.04.2019DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) PRÜFVORRICHTUNG UND VERFAHREN ZUR VERMESSUNG DER HOMOGENITÄT EINES OPTISCHEN ELEMENTS
(EN) TESTING DEVICE AND METHOD FOR MEASURING THE HOMOGENEITY OF AN OPTICAL ELEMENT
(FR) DISPOSITIF DE CONTRÔLE ET PROCÉDÉ POUR MESURER L'HOMOGÉNÉITÉ D'UN ÉLÉMENT OPTIQUE
Abstract
(DE)
Die Erfindung betrifft eine Prüfvorrichtung (1) zur Vermessung der Homogenität eines optischen Elements (10) in einem Strahlengang (5) der Prüfvorrichtung, die ein Interferometer (2) enthält, das eine monochromatisch Lichtquelle (3), ein anpassbares Objektiv (6), eine Referenzfläche (7), die einer Oberfläche des zu prüfenden optischen Elements oder einer Interferometrie-Oberfläche (16) zugeordnet ist, und eine Analyseeinheit (8) für die Interferenz der Wellenfronten des von der Referenzfläche (7) und der zugehörigen Oberfläche des zu prüfenden optischen Elements oder der Interferometrie-Oberfläche reflektierten Lichts umfasst. Die Erfindung betrifft weiterhin ein entsprechendes Verfahren. Ihre Aufgabe ist es, eine Prüfvorrichtung und ein Verfahren zur hochpräzisen Vermessung der Homogenität eines optischen Elements - nicht nur einzelner Flächen sondern der Gesamtheit des optischen Elements - bereitzustellen, das insbesondere auch für die hochpräzise Vermessung von Kunststoff-Linsen bzw. anderen Spritzguss-Komponenten für die refraktive Augen-Laserchirurgie geeignet ist. Diese Aufgabe wird gelöst durch eine Referenzfläche die der der Prüfvorrichtung abgewandten Oberfläche (11) des optischen Elements oder einer Interferometrie-Oberfläche im Strahlengang hinter dem zu prüfenden optischen Element zugeordnet ist, bevorzugt unter Zuhilfenahme eines Kompensationselements (9) zur Kompensation der monochromatischen Aberration.
(EN)
The invention relates to a testing device (1) for measuring the homogeneity of an optical element (10) in a beam path (5) of the testing device, the testing device containing an interferometer (2), which comprises a monochromatic light source (3), an adjustable objective (6), a reference surface (7) associated with a surface of the optical element to be tested or of an interferometry surface (16), and an analysis unit (8) for the interference of the wave fronts of the light reflected by the reference surface (7) and the associated surface of the optical element to be tested or of the interferometry surface. The invention further relates to a corresponding method. The problem addressed by the invention is that of providing a testing device and a method for the highly precise measurement of the homogeneity of an optical element - not merely individual surfaces but the entirety of the optical element, the method being suitable in particular also for the highly precise measurement of plastic lenses or other injection moulded components for refractive laser eye surgery. The problem is solved by a reference surface associated with the surface (11) of the optical element facing away from the testing device or of an interferometry surface in the beam path after the optical element being tested, preferably with the aid of a compensation element (9) for compensating the monochromatic aberration.
(FR)
L'invention concerne un dispositif de contrôle (1) destiné à mesurer l'homogénéité d'un élément optique (10) dans un trajet de rayon (5) du dispositif de contrôle, qui contient un interféromètre (2), qui comporte une source de lumière monochromatique (3), un objectif adaptable (6), une surface de référence (7) qui est associée à une surface de l'élément optique à contrôler ou à une surface d'interférométrie (16), et une unité d'analyse (8) pour l'interférence des fronts d'onde de la lumière réfléchie par la surface de référence (7) et la surface associée de l'élément optique à contrôler ou par la surface d'interférométrie. L'invention concerne en outre un procédé correspondant. L'invention a pour objet de fournir un dispositif de contrôle et un procédé pour la mesure de haute précision de l'homogénéité d'un élément optique - non seulement des surfaces individuelles mais de l'élément optique entier - qui convient particulièrement aussi à la mesure de haute précision de lentilles en matière plastique ou d'autres composants moulés par injection pour la chirurgie réfractive au laser des yeux. Cet objet est réalisé par une surface de référence qui est associée à la surface (11) de l'élément optique à l'opposé du dispositif de contrôle ou à une surface d'interférométrie dans le trajet de rayon derrière l'élément optique à contrôler, de préférence à l'aide d'un élément de compensation (9) destiné à compenser l'aberration monochromatique.
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