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1. WO2020200637 - OPTICAL FIBER

Publication Number WO/2020/200637
Publication Date 08.10.2020
International Application No. PCT/EP2020/055906
International Filing Date 05.03.2020
IPC
G02B 6/02 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
02Optical fibre with cladding
H01S 3/00 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
C03B 37/012 2006.01
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL; SUPPLEMENTARY PROCESSES IN THE MANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL
37Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
01Manufacture of glass fibres or filaments
012Manufacture of preforms for drawing fibres or filaments
CPC
C03B 2203/14
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
2203Fibre product details, e.g. structure, shape
10Internal structure or shape details
14Non-solid, i.e. hollow products, e.g. hollow clad or with core-clad interface
C03B 2203/16
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
2203Fibre product details, e.g. structure, shape
10Internal structure or shape details
14Non-solid, i.e. hollow products, e.g. hollow clad or with core-clad interface
16Hollow core
C03B 2203/42
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
2203Fibre product details, e.g. structure, shape
42Photonic crystal fibres, e.g. fibres using the photonic bandgap PBG effect, microstructured or holey optical fibres
C03B 37/0122
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
37Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
01Manufacture of glass fibres or filaments
012Manufacture of preforms for drawing fibres or filaments
01205starting from tubes, rods, fibres or filaments
01211by inserting one or more rods or tubes into a tube
0122for making preforms of photonic crystal, microstructured or holey optical fibres
G02B 6/02304
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
02Optical fibre with cladding ; with or without a coating
02295Microstructured optical fibre
023having different index layers arranged around the core for guiding light by reflection, i.e. 1D crystal, e.g. omniguide
02304Core having lower refractive index than cladding, e.g. air filled, hollow core
G02B 6/02328
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
02Optical fibre with cladding ; with or without a coating
02295Microstructured optical fibre
02314Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
02319characterised by core or core-cladding interface features
02323Core having lower refractive index than cladding, e.g. photonic band gap guiding
02328Hollow or gas filled core
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL]
Inventors
  • UEBEL, Patrick, Sebastian
  • BAUERSCHMIDT, Sebastian, Thomas
  • GÖTZ, Peter, Maximilian
Agents
  • WILLEKENS, Jeroen Pieter Frank
Priority Data
19167130.403.04.2019EP
19173416.909.05.2019EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) OPTICAL FIBER
(FR) FIBRE OPTIQUE
Abstract
(EN)
An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.
(FR)
L'invention concerne une fibre optique, un appareil pour recevoir un rayonnement d'entrée et élargir une plage de fréquences, une source de rayonnement, un agencement de métrologie et un appareil lithographique. La fibre optique comprend un noyau creux, une partie de gainage et une partie de support. La partie de gainage entoure le noyau creux et comprend une pluralité d'éléments anti-résonance pour guider un rayonnement à travers le noyau creux. La partie de support entoure et supporte la partie de gainage et comprend une partie de support interne, une partie de support externe et une partie de liaison déformable qui relie la partie de support interne à la partie de support externe.
Latest bibliographic data on file with the International Bureau