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1. WO2020200360 - THZ MEASURING DEVICE AND THZ MEASURING METHOD FOR DETERMINING A LAYER THICKNESS OR A DISTANCE OF A MEASUREMENT OBJECT

Publication Number WO/2020/200360
Publication Date 08.10.2020
International Application No. PCT/DE2020/100188
International Filing Date 13.03.2020
IPC
G01B 11/06 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width, or thickness
06for measuring thickness
G01B 11/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width, or thickness
G01B 11/10 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
08for measuring diameters
10of objects while moving
G01B 11/245 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
245using a plurality of fixed, simultaneously operating transducers
G01B 11/27 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
26for measuring angles or tapers; for testing the alignment of axes
27for testing the alignment of axes
G01N 21/3581 2014.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
CPC
G01B 11/026
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width or thickness
026by measuring distance between sensor and object
G01B 11/0691
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width or thickness
06for measuring thickness, e.g. of sheet material
0691of objects while moving
G01B 11/10
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
08for measuring diameters
10of objects while moving
G01B 11/245
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
245using a plurality of fixed, simultaneously operating transducers
G01B 11/27
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
26for measuring angles or tapers; for testing the alignment of axes
27for testing the alignment of axes
G01N 21/8422
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
8422Investigating thin films, e.g. matrix isolation method
Applicants
  • CITEX HOLDING GMBH [DE]/[DE]
Inventors
  • BÖHM, Roland
Agents
  • ADVOPAT PATENT- UND RECHTSANWÄLTE
Priority Data
10 2019 108 299.429.03.2019DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) THZ-MESSVORRICHTUNG UND THZ-MESSVERFAHREN ZUM ERMITTELN EINER SCHICHTDICKE ODER EINES ABSTANDES EINES MESSOBJEKTES
(EN) THZ MEASURING DEVICE AND THZ MEASURING METHOD FOR DETERMINING A LAYER THICKNESS OR A DISTANCE OF A MEASUREMENT OBJECT
(FR) DISPOSITIF DE MESURE TÉRAHERTZ ET PROCÉDÉ DE MESURE TÉRAHERTZ DESTINÉS À LA DÉTERMINATION D'UNE ÉPAISSEUR DE COUCHE OU D'UNE DISTANCE D'UN OBJET À MESURER
Abstract
(DE)
THz-Messvorrichtung zur Messung einer Schichtdicke einer Wandung (4a) eines Messobjektes (4), mit einer Terahertz Sende- und Empfangseinheit (2), einer Steuereinrichtung, die ausgebildet ist, die Schichtdicke der Wandung (4a) des Messobjektes (4) aus einer Laufzeitdifferenz der an einer ersten Grenzfläche (4b, 4c) der Wandung (4a) des Messobjektes (4) reflektierten Terahertz- Strahlung und der an einer zweiten Grenzfläche (4b, 4c) der Wandung (4a) reflektierten Terahertz-Strahlung zu ermitteln, wobei im Strahlengang (5) der mindestens einen Sende-und Empfangseinheit (2) eine verstellbare Optikeinheit (7) mit einem Reflektor angeordnet ist, wobei eine Oberfläche des Reflektors ausgebildet ist, die eingestrahlte Terahertz-Strahlung und/oder die von der jeweiligen Grenzfläche (4b, 4c) reflektierte Terahertz-Strahlung abzulenken zum Einstellen der optischen Achse (C) der Sende- und Empfangseinheit (2). Erfindungsgemäß ist dabei vorgesehen, dass der Reflektor verformbar ausgebildet ist, so dass ein Strahlquerschnitt der eingestrahlten Terahertz-Strahlung in einer in Strahlrichtung der eingestrahlten Terahertz-Strahlung hinter dem Reflektor liegenden Fokussierebene (17) veränderbar ist, wobei die Fokussierebene durch die Verformung des Reflektors einstellbar ist.
(EN)
The invention relates to a THz measuring device for measuring a layer thickness of a wall (4a) of a measurement object (4), comprising a terahertz transmitting and receiving unit (2), a control apparatus, which is designed to determine the layer thickness of the wall (4a) of the measurement object (4) from a time-of-flight difference between the terahertz radiation reflected at a first boundary surface (4b, 4c) of the wall (4a) of the measurement object (4) and the terahertz radiation reflected at a second boundary surface (4b, 4c) of the wall (4a), wherein: - an adjustable optical unit (7) having a reflector is arranged in the beam path (5) of the at least one transmitting and receiving unit (2); - a surface of the reflector is designed to deflect the terahertz radiation radiated in and/or the terahertz radiation reflected by each of the boundary surfaces (4b, 4c) in order to adjust the optical axis (C) of the transmitting and receiving unit (2). According to the invention, the reflector is deformable such that a beam cross-section of the terahertz radiation radiated in, in a focusing plane (17) lying downstream of the reflector in the beam direction of the terahertz radiation radiated in, can be changed, the focusing plane being adjustable by means of the deformation of the reflector.
(FR)
La présente invention concerne un dispositif de mesure térahertz destiné à la mesure d'une épaisseur de couche d'une paroi (4a) d'un objet à mesurer (4), comprenant une unité émettrice et réceptrice (2) térahertz, un dispositif de commande, qui est conçu pour déterminer l'épaisseur de couche de la paroi (4a) de l'objet à mesurer (4) en fonction d'une différence temporelle de transit entre le rayonnement térahertz réfléchi à une première interface (4b, 4c) de la paroi (4a) de l'objet à mesurer (4) et le rayonnement térahertz réfléchi à une seconde interface (4b, 4c) de la paroi (4a) ; une unité optique (7) réglable comportant un réflecteur étant agencée dans le trajet de faisceau (5) de l'au moins une unité émettrice et réceptrice (2) ; une surface du réflecteur étant conçue pour dévier le rayonnement térahertz rayonné et/ou le rayonnement térahertz réfléchi par l'interface (4b, 4c) respective pour régler un axe optique (C) de l'unité émettrice et réceptrice (2). Selon l'invention, le réflecteur est conçu déformable de telle sorte qu'une section transversale du faisceau du rayonnement térahertz rayonné peut être modifiée dans un plan de focalisation (17) situé derrière le réflecteur dans la direction du faisceau du rayonnement térahertz rayonné, le plan de focalisation étant réglable par déformation du réflecteur.
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