Processing

Please wait...

Settings

Settings

Goto Application

1. WO2020198752 - SYSTEM AND METHOD FOR LEARNING-GUIDED ELECTRON MICROSCOPY

Publication Number WO/2020/198752
Publication Date 01.10.2020
International Application No. PCT/US2020/025832
International Filing Date 30.03.2020
IPC
H01J 37/28 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron- or ion-diffraction tubes
28with scanning beams
G02B 21/00 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
CPC
G06K 9/3233
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
KRECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
9Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
20Image acquisition
32Aligning or centering of the image pick-up or image-field
3233Determination of region of interest
G06T 2207/10061
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
10Image acquisition modality
10056Microscopic image
10061from scanning electron microscope
G06T 2207/20084
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
20Special algorithmic details
20084Artificial neural networks [ANN]
G06T 7/11
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
10Segmentation; Edge detection
11Region-based segmentation
H01J 2237/1536
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
153Correcting image defects, e.g. stigmators
1536Image distortions due to scanning
H01J 37/21
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
21Means for adjusting the focus
Applicants
  • MASSACHUSETTS INSTITUTE OF TECHNOLOGY [US]/[US]
  • PRESIDENT AND FELLOWS OF HARVARD COLLEGE [US]/[US]
Inventors
  • SHAVIT, Nir
  • SAMUEL, Aravinathan
  • LICHTMAN, Jeff
  • MI, Lu
Agents
  • NIEVES, Peter, A.
Priority Data
62/825,72228.03.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SYSTEM AND METHOD FOR LEARNING-GUIDED ELECTRON MICROSCOPY
(FR) SYSTÈME ET PROCÉDÉ DESTINÉS À LA MICROSCOPIE ÉLECTRONIQUE GUIDÉE PAR APPRENTISSAGE
Abstract
(EN)
A system and method is provided for rapidly collecting high quality images of a specimen through controlling a re-focusable beam of an electron microscope. An intelligent acquisition system instructs the electron microscope to perform an initial low-resolution scan of a sample. A low-resolution image of the sample is received by the intelligent acquisition system as scanned image information from the electron microscope. The intelligent acquisition system then determines regions of interest within the low-resolution image and instructs the electron microscope to perform a high-resolution scan of the sample, only in areas of the sample corresponding to the determined regions of interest or portions of the determined regions of interest, so that other regions within the sample are not scanned at high-resolution. The intelligent acquisition system then reconstructs an image using the collected high-resolution scan pixels and pixels in the received low-resolution image.
(FR)
L'invention concerne un système et un procédé de collecte rapide d'images de haute qualité d'un spécimen par commande d'un faisceau pouvant être refocalisé d'un microscope électronique. Un système intelligent d'acquisition ordonne au microscope électronique d'effectuer un balayage initial à basse résolution d'un échantillon. Une image à basse résolution de l'échantillon est reçue par le système intelligent d'acquisition sous forme d'informations d'image balayée provenant du microscope électronique. Le système intelligent d'acquisition détermine ensuite des régions d'intérêt (RdI) à l'intérieur de l'image à basse résolution et ordonne au microscope électronique d'effectuer un balayage à haute résolution de l'échantillon, uniquement dans des zones de l'échantillon correspondant aux régions déterminées d'intérêt ou à des parties des régions déterminées d'intérêt, afin que d'autres régions ne soient pas balayées à haute résolution à l'intérieur de l'échantillon. Le système d'acquisition intelligent reconstruit ensuite une image à l'aide des pixels collectés de balayage à haute résolution et des pixels de l'image reçue à basse résolution.
Latest bibliographic data on file with the International Bureau