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1. WO2020197895 - NON-LINE-OF-SIGHT DEPOSITION OF COATING ON INTERNAL COMPONENTS OF ASSEMBLED DEVICE

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[ EN ]

CLAIMS

What is claimed is:

1. A method comprising:

loading an assembled device into a deposition chamber, wherein the assembled device comprises one or more internal components that are enclosed within an interior of the assembled device; and

depositing a coating onto a surface of the internal components using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting

functionality of the assembled device, wherein the coating is a conformal, optically transparent coating, and wherein depositing the coating onto the surface of the internal components comprises injecting a precursor for the coating into the deposition chamber, wherein the precursor penetrates an exterior of the assembled device through one or more openings of the assembled device that expose the interior of the assembled device to an external environment.

2. The method of claim 1, wherein:

depositing the coating onto the surface of the internal components comprises performing a chemical vapor deposition process of a poly(p-xylylene) polymer in a vacuum; and

the coating comprises a poly(p-xylylene) polymer coating.

3. The method of claim 1, wherein the internal components comprise one or more optical components.

4. The method of claim 3, wherein the one or more optical components comprise at least one of an optical window, an optical lens, or a laser head.

5. The method of claim 3, wherein the assembled device further comprises an optical window in a wall of the assembled device, wherein the one or more optical components are configured to at least one of emit light that exits the assembled device through the optical window or receive light that enters the assembled device through the optical window.

6. The method of claim 1, wherein the assembled device comprises an optical encoder.

7. The method of claim 1, wherein the coating has an approximately uniform thickness of between about 0.1 microns to about 20 microns, and wherein the coating coats an entire interior of the assembled device.

8. The method of claim 1, wherein the coating is resistant to corrosion by at least one of fluorine-based acids, chlorine-based acids, sulfur-based acids, hydrogen-based acids, bromine based-acids, or nitrogen-based acids.

9. An article comprising:

an assembled device comprising one or more internal components enclosed within the assembled device; and

a coating deposited onto a surface of the internal components enclosed within the assembled device, wherein the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-based acids, chlorine-based acids, sulfur-based acids, hydrogen-based acids, bromine-based acids, or nitrogen-based acids and that does not negatively impact a functionality of the internal components.

10. The article of claim 9, wherein the coating comprises a poly(p-xylylene) polymer coating.

11. The article of claim 10, wherein the coating comprises C16H14C12.

12. The article of claim 9, wherein the internal components comprise one or more optical components.

13. The article of claim 12, wherein the assembled device further comprises an optical window in a wall of the assembled device, wherein the one or more optical components are configured to at least one of emit light that exits the assembled device through the optical window or receive light that enters the assembled device through the optical window.

14. The article of claim 9, wherein the coating has an approximately uniform thickness of between about 0.1 microns to about 20 microns, and wherein the coating coats an entire interior of the assembled device.

15. An article comprising an assembled device comprising one or more internal components that are enclosed within an interior of the assembled device, and a coating deposited onto a surface of the internal components enclosed within the assembled device, wherein the coating is a conformal, optically transparent coating, the article having been manufactured by a process comprising:

loading the assembled device into a deposition chamber; and

depositing the coating onto the surface of the internal components using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting

functionality of the assembled device, wherein depositing the coating onto the surface of the internal components comprises injecting a precursor for the coating into the deposition chamber, wherein the precursor penetrates an exterior of the assembled device through one or more openings of the assembled device that expose the interior of the assembled device to an external environment.