Processing

Please wait...

Settings

Settings

Goto Application

1. WO2020197895 - NON-LINE-OF-SIGHT DEPOSITION OF COATING ON INTERNAL COMPONENTS OF ASSEMBLED DEVICE

Publication Number WO/2020/197895
Publication Date 01.10.2020
International Application No. PCT/US2020/023450
International Filing Date 18.03.2020
IPC
C23C 16/44 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44characterised by the method of coating
G02B 3/00 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
3Simple or compound lenses
CPC
G02B 1/14
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made
10Optical coatings produced by application to, or surface treatment of, optical elements
14Protective coatings, e.g. hard coatings
G02B 1/16
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made
10Optical coatings produced by application to, or surface treatment of, optical elements
16having an anti-static effect, e.g. electrically conducting coatings
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • BERGER, Alexander
  • CHOU, Cheng-Hsuan
  • KNAPP, David
Agents
  • KIMES, Benjamin, A.
  • PORTNOVA, Marina
  • OGURCHAK, Audrey
Priority Data
16/820,33816.03.2020US
62/823,54025.03.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) NON-LINE-OF-SIGHT DEPOSITION OF COATING ON INTERNAL COMPONENTS OF ASSEMBLED DEVICE
(FR) DÉPÔT HORS DE PORTÉE VISUELLE D'UN REVÊTEMENT SUR DES COMPOSANTS INTERNES D'UN DISPOSITIF ASSEMBLÉ
Abstract
(EN)
Described herein is a method of depositing a conformal, optically transparent coating onto a surface of one or more internal components that are enclosed within an assembled device using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting functionality of the assembled device. Also described is an assembled device including one or more internal components enclosed within the assembled device and a coating deposited onto a surface of the internal components enclosed within the assembled device, where the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-, chlorine-, sulfur-, hydrogen-, bromine-, or nitrogen-based acids and that does not negatively impact functionality of the internal components.
(FR)
L'invention concerne un procédé de dépôt d'un revêtement enrobant optiquement transparent sur une surface d'un ou de plusieurs composants internes qui sont contenus dans un dispositif assemblé à l'aide d'un procédé de dépôt hors de portée visuelle sans modifier une structure du dispositif assemblé ou sans affecter une fonctionnalité du dispositif assemblé. L'invention concerne également un dispositif assemblé comprenant un ou plusieurs composants internes contenus dans le dispositif assemblé et un revêtement déposé sur une surface des composants internes contenus dans le dispositif assemblé, le revêtement étant un revêtement enrobant optiquement transparent qui résiste à la corrosion par au moins un acide parmi les acides à base de fluor, de chlore, de soufre, d'hydrogène, de brome ou d'azote et qui n'a pas d'impact négatif sur la fonctionnalité des composants internes.
Also published as
Latest bibliographic data on file with the International Bureau