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1. WO2020197705 - PLASMA REACTORS HAVING RECUPERATORS

Publication Number WO/2020/197705
Publication Date 01.10.2020
International Application No. PCT/US2020/020570
International Filing Date 01.03.2020
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
CPC
B01J 19/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19Chemical, physical or physico-chemical processes in general; Their relevant apparatus
08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
12employing electromagnetic waves
C23C 16/511
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
50using electric discharges
511using microwave discharges
G01J 1/0425
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
02Details
04Optical or mechanical part ; supplementary adjustable parts
0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
0425using optical fibers
G01J 1/0492
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
02Details
04Optical or mechanical part ; supplementary adjustable parts
0488with spectral filtering
0492using at least two different filters
G01J 1/4228
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
42using electric radiation detectors
4228arrangements with two or more detectors, e.g. for sensitivity compensation
G01J 1/429
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
42using electric radiation detectors
429applied to measurement of ultraviolet light
Applicants
  • RECARBON, INC. [US]/[US]
Inventors
  • LEONARD III, George Stephen
  • MCCLELLAND, Stefan Andrew
  • KOO, Jae Mo
Agents
  • PARK, Chung Sik
Priority Data
16/805,67028.02.2020US
62/823,43625.03.2019US
62/823,48425.03.2019US
62/823,49225.03.2019US
62/823,50525.03.2019US
62/823,50825.03.2019US
62/823,51425.03.2019US
62/823,51725.03.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PLASMA REACTORS HAVING RECUPERATORS
(FR) RÉACTEURS À PLASMA DOTÉS DE RÉCUPÉRATEURS
Abstract
(EN)
A plasma generating system (10) includes a waveguide (20) for transmitting a microwave energy therethrough and an inner wall (40) disposed within the waveguide to define a plasma cavity, where plasma (46) is generated within the plasma cavity using the microwave energy. The plasma generating system (10) further includes: an adaptor (44) having a gas outlet (32) through which an exhaust gas processed by the plasma (46) exits the plasma cavity; and a recuperator (100) directly attached to the adaptor (44) and having a gas passageway that is in fluid communication with the gas outlet (32) in the adaptor (44). The recuperator (100) recovers heat energy from the exhaust gas and heats an input gas using the heat energy.
(FR)
La présente invention concerne un système de génération de plasma (10) comprenant un guide d'ondes (20) destiné à transmettre une énergie micro-onde à travers ce dernier et une paroi interne (40) disposée à l'intérieur du guide d'ondes de manière à définir une cavité à plasma, le plasma (46) étant généré à l'intérieur de la cavité à plasma à l'aide de l'énergie micro-onde. Le système de génération de plasma (10) comprend en outre : un adaptateur (44) ayant une sortie de gaz (32) à travers laquelle un gaz d'échappement traité par le plasma (46) sort de la cavité à plasma ; et un récupérateur (100) directement fixé à l'adaptateur (44) et ayant un passage de gaz qui est en communication fluidique avec la sortie de gaz (32) dans l'adaptateur (44). Le récupérateur récupère l'énergie thermique du gaz d'échappement et chauffe un gaz d'entrée à l'aide de l'énergie thermique.
Also published as
Latest bibliographic data on file with the International Bureau