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1. WO2020197067 - DEPOSITION APPARATUS

Publication Number WO/2020/197067
Publication Date 01.10.2020
International Application No. PCT/KR2020/000989
International Filing Date 21.01.2020
IPC
C23C 14/24 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
C23C 14/26 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
26by resistance or inductive heating of the source
C23C 14/54 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
54Controlling or regulating the coating process
Applicants
  • 엘지전자 주식회사 LG ELECTRONICS INC. [KR]/[KR]
Inventors
  • 문병준 MOON, Byoungjun
  • 이상규 LEE, Sangkyu
  • 신대성 SHIN, Daeseong
  • 홍훈호 HONG, Hunho
Agents
  • 허용록 HAW, Yong Noke
Priority Data
10-2019-003386125.03.2019KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) DEPOSITION APPARATUS
(FR) APPAREIL DE DÉPÔT
(KO) 증착 장치
Abstract
(EN)
The purpose of the present invention is to provide a deposition apparatus for more accurately measuring the amount of remaining deposition raw material present in a crucible, the deposition apparatus comprising: a crucible in which the deposition raw material is filled, and which has a nozzle for guiding deposition material evaporated from the deposition raw material; a heater part comprising a heater unit for releasing heat for heating the crucible, and a heater frame on which the heater unit is mounted; a cooling part placed outside the heater part; a chamber having a deposition space which is formed therein and in which the crucible, the heater part and the cooling part are accommodated; and a weight measurement module for measuring the weight of the crucible, wherein a mount part on which the crucible is mounted can be formed on the heater frame.
(FR)
Le but de la présente invention est de fournir un appareil de dépôt permettant de mesurer plus précisément la quantité de matière première de dépôt restant dans un creuset, l'appareil de dépôt comprenant : un creuset dans lequel se trouve la matière première de dépôt, et qui a une buse pour guider un matériau de dépôt évaporé à partir de la matière première de dépôt ; un élément de chauffage comprenant une unité de chauffage pour libérer de la chaleur pour chauffer le creuset, et un bâti de chauffage sur lequel est montée l'unité de chauffage ; un élément de refroidissement placé à l'extérieur de la partie de chauffage ; une chambre ayant un espace de dépôt formé à l'intérieur de cette dernière et dans laquelle sont logés le creuset, l'élément de chauffage et l'élément de refroidissement ; et un module de pesée pour peser le creuset. Un élément de montage sur lequel est monté le creuset peut être formé sur le bâti du chauffage.
(KO)
본 발명은 도가니에 존재하는 증착 원료의 잔량을 보다 정확하게 측정하는 증착 장치를 제공하기 위한 것으로, 증착 원료가 충전되며, 증착 원료에서 증발된 증착 물질을 안내하는 노즐을 갖는 도가니, 도가니를 가열하기 위한 열을 방출하는 히터 유닛과, 히터 유닛이 장착되는 히터 프레임을 포함하는 히터부, 히터부의 외측에 배치되는 냉각부, 도가니, 히터부, 냉각부가 수용되는 증착 공간이 형성된 챔버, 및 도가니의 무게를 측정하는 무게측정모듈을 포함하고, 히터 프레임에는 도가니가 안착되는 안착부가 형성될 수 있다.
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