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1. WO2020196355 - COATING DEVICE AND HEAD UNIT

Publication Number WO/2020/196355
Publication Date 01.10.2020
International Application No. PCT/JP2020/012578
International Filing Date 23.03.2020
IPC
B05C 11/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
11Component parts, details or accessories not specifically provided for in groups B05C1/-B05C9/132
B05C 11/10 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
11Component parts, details or accessories not specifically provided for in groups B05C1/-B05C9/132
10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
G01B 11/14 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
14for measuring distance or clearance between spaced objects or spaced apertures
B05C 5/02 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
5Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
02from an outlet device in contact, or almost in contact, with the work
G01B 21/16 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
16for measuring distance or clearance between spaced objects
Applicants
  • 株式会社ニコン NIKON CORPORATION [JP]/[JP]
Inventors
  • 内藤 一夫 NAITO Kazuo
  • 鬼頭 義昭 KITO Yoshiaki
Agents
  • 西澤 和純 NISHIZAWA Kazuyoshi
  • 大浪 一徳 ONAMI Kazunori
  • 小林 淳一 KOBAYASHI Junichi
Priority Data
2019-06218428.03.2019JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) COATING DEVICE AND HEAD UNIT
(FR) DISPOSITIF DE REVÊTEMENT ET UNITÉ DE TÊTE
(JA) 塗布装置、並びにヘッドユニット
Abstract
(EN)
This coating device applies, with a prescribed thickness, to a surface of a to-be-processed substrate supported by a substrate support mechanism, a coating liquid discharged through an opening which is formed at a leading end facing the surface of the to-be-processed substrate and which extends in a slit shape in a first direction, the coating device being provided with: a die head mechanism which comprises a pair of inner wall surfaces extending in the first direction opposingly to each other with a prescribed gap therebetween so as to form a flow path through which the coating liquid flows from a storage part, which extends in the first direction so as to temporarily store the coating liquid, toward the opening of the leading end; and an opening width measurement mechanism for measuring a change in the gap between the inner wall surfaces in order to detect a change in the width of the opening in a second direction orthogonal to the first direction.
(FR)
La présente invention concerne un dispositif de revêtement qui applique, selon une épaisseur prescrite, sur une surface d'un substrat à traiter supporté par un mécanisme de support de substrat, un liquide de revêtement déchargé à travers une ouverture qui est formée au niveau d'une extrémité avant faisant face à la surface du substrat à traiter et qui s'étend dans une forme de fente dans une première direction, le dispositif de revêtement étant pourvu : d'un mécanisme de tête de matrice qui comprend une paire de surfaces de paroi interne s'étendant dans la première direction de manière opposée l'une à l'autre avec un espace prescrit entre elles de façon à former un trajet d'écoulement à travers lequel le liquide de revêtement s'écoule depuis une partie de stockage, qui s'étend dans la première direction de façon à stocker temporairement le liquide de revêtement, vers l'ouverture de l'extrémité avant ; et un mécanisme de mesure de largeur d'ouverture destiné à mesurer une variation de l'espace entre les surfaces de paroi interne afin de détecter une variation de la largeur de l'ouverture dans une deuxième direction orthogonale à la première direction.
(JA)
基板支持機構で支持される被処理基板の表面と対向した先端部に、第1方向にスリット状に延びて形成された開口部から吐出される塗布液を、前記被処理基板の表面に所定の厚さで塗布する塗布装置は、塗布液を一時的に貯留する為に第1方向に延設された貯留部から先端部の開口部に向けて塗布液を通す流路を形成するように、所定の間隔で対向して第1方向に延設された一対の内壁面で構成されるダイヘッド機構を有し、更に第1方向と直交した第2方向における開口部の幅の変化を検出する為に、一対の内壁面の間隔の変化を計測する開口幅計測機構が設けられている。
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