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1. WO2020196339 - ELECTRODE-EMBEDDED MEMBER AND METHOD FOR MANUFACTURING SAME, ELECTROSTATIC CHUCK, AND CERAMIC HEATER

Publication Number WO/2020/196339
Publication Date 01.10.2020
International Application No. PCT/JP2020/012499
International Filing Date 19.03.2020
IPC
H05B 3/02 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
3Ohmic-resistance heating
02Details
H05B 3/12 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
3Ohmic-resistance heating
10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
12characterised by the composition or nature of the conductive material
H05B 3/74 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
3Ohmic-resistance heating
68Heating arrangements specially adapted for cooking plates or analogous hot-plates
74Non-metallic plates
C04B 35/581 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
515based on non-oxides
58based on borides, nitrides or silicides
581based on aluminium nitride
C04B 35/645 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
64Burning or sintering processes
645Pressure sintering
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
Applicants
  • 日本特殊陶業株式会社 NGK SPARK PLUG CO., LTD. [JP]/[JP]
Inventors
  • 薮花 優棋 YABUHANA Masaki
Agents
  • 特許業務法人創成国際特許事務所 SATO & ASSOCIATES
Priority Data
2019-05911326.03.2019JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) ELECTRODE-EMBEDDED MEMBER AND METHOD FOR MANUFACTURING SAME, ELECTROSTATIC CHUCK, AND CERAMIC HEATER
(FR) ÉLÉMENT INTÉGRÉ À UNE ÉLECTRODE ET SON PROCÉDÉ DE FABRICATION, PORTE-SUBSTRAT ÉLECTROSTATIQUE ET ÉLÉMENT CHAUFFANT EN CÉRAMIQUE
(JA) 電極埋設部材及びその製造方法、静電チャック、セラミックス製ヒーター
Abstract
(EN)
An electrode-embedded member 1 comprises: a ceramic base body 2; an electrode 3; a connection member 4 that includes tungsten and/or molybdenum and that is embedded in the base body 2 in a state in which one principal surface 4a faces the electrode 3 side and is electrically connected to the electrode 3; and a hole part 5 that extends from the outer surface of the base body 2 to another principal surface 4b of the connection member 4. A buffer member 10 embedded in the base body 2 includes at least a ceramic material that constitutes the base body 2 and a conductive material of which tungsten and/or molybdenum is a constituent element. The buffer member 10 covers at least a portion of an edge part of the connection member 4.
(FR)
Élément intégré (1) à une électrode comprenant un corps de base en céramique (2) ; une électrode (3) ; un élément de connexion (4) qui comprend du tungstène et/ou du molybdène et qui est incorporé dans le corps de base (2) dans un état dans lequel une surface principale (4a) fait face au côté de l'électrode (3) et est électriquement connectée à l'électrode (3) ; et une partie trou (5) qui s'étend depuis la surface externe du corps de base (2) jusqu'à une autre surface principale (4b) de l'élément de connexion (4). Un élément tampon (10) intégré dans le corps de base (2) comprend au moins un matériau céramique qui constitue le corps de base (2) et un matériau conducteur dont le tungstène et/ou le molybdène sont un élément constitutif. L'élément tampon (10) recouvre au moins une partie d'une partie de bord de l'élément de connexion (4).
(JA)
電極埋設部材1は、セラミックス製の基体2と、電極3と、一方の主面4aが電極3側を向き、且つ電極3と電気的に接続された状態で基体2に埋設されたタングステン又はモリブデンの少なくとも一方を含む接続部材4と、基体2の外面から接続部材4の他方の主面4bまで延びる穴部5と、を備える。基体2に埋設された緩衝部材10は、少なくとも基体2を構成するセラミックス材料とタングステン及びモリブデンの少なくとも一方を構成元素とする導電性材料とを含み、且つ緩衝部材10は、接続部材4の縁部の少なくとも一部を覆う。
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