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1. WO2020196281 - METHOD FOR POLISHING TARGET MATERIAL, METHOD FOR PRODUCING TARGET MATERIAL, AND METHOD FOR PRODUCING RECYCLED INGOT

Publication Number WO/2020/196281
Publication Date 01.10.2020
International Application No. PCT/JP2020/012335
International Filing Date 19.03.2020
IPC
C23C 14/34 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
B24B 21/12 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
21Machines or devices using grinding or polishing belts; Accessories therefor
04for grinding plane surfaces
12involving a contact wheel or roller pressing the belt against the work
B24B 23/06 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
23Portable grinding machines, e.g. hand-guided; Accessories therefor
06with abrasive belts, e.g. with endless travelling belts; Accessories therefor
B24D 7/06 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
DTOOLS FOR GRINDING, BUFFING OR SHARPENING
7Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
06with inserted abrasive blocks, e.g. segmental
B24D 11/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
DTOOLS FOR GRINDING, BUFFING OR SHARPENING
11Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
B24D 11/06 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
DTOOLS FOR GRINDING, BUFFING OR SHARPENING
11Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
06Connecting the ends of materials, e.g. for making abrasive belts
Applicants
  • 住友化学株式会社 SUMITOMO CHEMICAL COMPANY, LIMITED [JP]/[JP]
Inventors
  • 西岡 宏司 NISHIOKA, Koji
  • 塚田 洋行 TSUKADA, Hiroyuki
  • 徳永 真喜 TOKUNAGA, Naoki
Agents
  • 中山 亨 NAKAYAMA, Tohru
  • 坂元 徹 SAKAMOTO, Toru
Priority Data
2019-06315428.03.2019JP
2019-22538913.12.2019JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD FOR POLISHING TARGET MATERIAL, METHOD FOR PRODUCING TARGET MATERIAL, AND METHOD FOR PRODUCING RECYCLED INGOT
(FR) PROCÉDÉ DE POLISSAGE DE MATÉRIAU CIBLE, PROCÉDÉ DE PRODUCTION DE MATÉRIAU CIBLE, ET PROCÉDÉ DE PRODUCTION DE LINGOT RECYCLÉ
(JA) ターゲット材の研磨方法、ターゲット材の製造方法及びリサイクル鋳塊の製造方法
Abstract
(EN)
The present invention addresses the problem of providing a method for polishing a target material, whereby it becomes possible to remove a bonding material from the target material and to reduce the clogging in a polishing material. The method for polishing a target material according to the present invention is a method for polishing a target material separated from a sputtering target formed by bonding the target material to a support member with a bonding material, the method comprising polishing a bonding surface of the target material, i.e., a surface of the target material which has been bonded to the support member, with a polishing material which comprises a plurality of block bodies each composed of a grind stone, wherein the plurality of block bodies are arranged on a single plane in such a manner that adjacent two block bodies are separated from each other with a gap space interposed therebetween.
(FR)
La présente invention aborde le problème consistant à fournir un procédé de polissage d'un matériau cible, moyennant quoi il devient possible d'éliminer un matériau de liaison du matériau cible et de réduire l’obstruction dans un matériau de polissage. Le procédé de polissage d'un matériau cible, selon la présente invention, est un procédé de polissage d'un matériau cible séparé d'une cible de pulvérisation formée par liaison du matériau cible à un élément support au moyen d’un matériau de liaison, le procédé consistant à polir une surface de liaison du matériau cible, c'est-à-dire, une surface du matériau cible qui a été liée à l'élément support, au moyen d’un matériau de polissage qui comprend une pluralité de corps blocs chacun composé d'une meule, la pluralité de corps blocs étant agencés sur un plan unique de sorte que les deux corps blocs adjacents soient séparés l'un de l'autre par un écart interposé entre eux.
(JA)
ターゲット材から接合材を除去することができると共に研磨材の目詰まりを低減できるターゲット材の研磨方法を提供することを課題とする。 本発明に係るターゲット材の研磨方法は、ターゲット材と支持部材とを接合材によって接合して構成されるスパッタリングターゲットから分離されたターゲット材を研磨する方法であって、前記ターゲット材における、前記支持部材と接合していた接合面を、砥石からなる複数のブロック体を含むと共に、前記複数のブロック体が隣接するブロック体と隙間を介して離隔するように同一面に配列されている研磨材を用いて、研磨することを含む。
Also published as
Latest bibliographic data on file with the International Bureau