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1. WO2020195670 - METHOD FOR DETECTING ABNORMAL GROWTH OF GRAPHENE, MEASUREMENT METHOD, AND FILM FORMATION SYSTEM

Publication Number WO/2020/195670
Publication Date 01.10.2020
International Application No. PCT/JP2020/009360
International Filing Date 05.03.2020
IPC
G01J 4/04 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
4Measuring polarisation of light
04Polarimeters using electric detection means
G01N 21/21 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
21Polarisation-affecting properties
C01B 32/186 2017.01
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
32Carbon; Compounds thereof
15Nanosized carbon materials
182Graphene
184Preparation
186by chemical vapour deposition
Applicants
  • 東京エレクトロン株式会社 TOKYO ELECTRON LIMITED [JP]/[JP]
Inventors
  • 井福 亮太 IFUKU Ryota
  • 松本 貴士 MATSUMOTO Takashi
  • 藤尾 朗 FUJIO Akira
  • 河野 伸 KONO Shin
Agents
  • 高山 宏志 TAKAYAMA Hiroshi
Priority Data
2019-05593225.03.2019JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD FOR DETECTING ABNORMAL GROWTH OF GRAPHENE, MEASUREMENT METHOD, AND FILM FORMATION SYSTEM
(FR) PROCÉDÉ DE DÉTECTION DE CROISSANCE ANORMALE DE GRAPHÈNE, PROCÉDÉ DE MESURE ET SYSTÈME DE FORMATION DE FILM
(JA) グラフェンの異常成長を検出する方法および測定装置、ならびに成膜システム
Abstract
(EN)
This method for detecting abnormal growth of graphene includes: measuring, through spectral ellipsometry, the reflectance spectrum of a measurement subject in which a graphene film formed by CVD is provided on a substrate; creating a film structure model to calculate polarization parameters, and incorporating the calculated polarization parameters into the measurement value through fitting; and detecting abnormal growth of graphene on the basis of the value of the degree of conformance when the polarization parameters are fitted.
(FR)
L'invention concerne un procédé de détection de croissance anormale de graphène comprenant : la mesure, par ellipsométrie spectrale, du spectre de réflectance d'un sujet de mesure dans lequel un film de graphène formé par CVD est disposé sur un substrat ; la création d'un modèle de structure de film afin de calculer des paramètres de polarisation, et l'incorporation des paramètres de polarisation calculés dans la valeur de mesure par l’intermédiaire d'un ajustement ; et la détection d'une croissance anormale de graphène en fonction de la valeur du degré de conformité lorsque les paramètres de polarisation sont ajustés.
(JA)
グラフェンの異常成長を検出する方法は、分光エリプソメトリーにより、基板上にCVDにより形成されたグラフェン膜を有する測定対象の反射スペクトルを測定することと、膜構造モデルを作成して、偏光パラメータを計算し、フィッティングにより偏光パラメータの計算値を測定値に合わせ込むことと、偏光パラメータをフィッティングした際の適合度の値に基づいてグラフェンの異常成長を検出することとを有する。
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