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1. WO2020195137 - INSPECTION DEVICE AND INSPECTION METHOD

Publication Number WO/2020/195137
Publication Date 01.10.2020
International Application No. PCT/JP2020/003249
International Filing Date 29.01.2020
IPC
H01L 21/66 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
G01N 21/64 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63optically excited
64Fluorescence; Phosphorescence
G01N 21/88 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
Applicants
  • 浜松ホトニクス株式会社 HAMAMATSU PHOTONICS K.K. [JP]/[JP]
Inventors
  • 中村 共則 NAKAMURA Tomonori
Agents
  • 長谷川 芳樹 HASEGAWA Yoshiki
  • 黒木 義樹 KUROKI Yoshiki
  • 柴山 健一 SHIBAYAMA Kenichi
Priority Data
2019-06298328.03.2019JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) INSPECTION DEVICE AND INSPECTION METHOD
(FR) DISPOSITIF ET PROCÉDÉ D’INSPECTION
(JA) 検査装置及び検査方法
Abstract
(EN)
An inspection device that inspects samples in which are formed a plurality of light-emitting elements including first light-emitting elements and second light-emitting elements placed in the periphery of the first light-emitting elements, the inspection device comprising: an excitation light source that generates excitation light irradiated on the sample; a camera that images fluorescence from the sample; and an assessment unit of a control device that calculates relative luminance of the fluorescence from the first light-emitting element on the basis of the fluorescence from the first light-emitting element and fluorescence from the second light-emitting element imaged by the camera, and performs pass/fail assessment of the first light-emitting element by comparing a calculated value based on the absolute luminance and relative luminance of fluorescence from the first light-emitting element with a prescribed threshold value.
(FR)
L'invention concerne un dispositif d'inspection qui inspecte des échantillons dans lequel sont formés une pluralité d'éléments électroluminescents comprenant des premiers éléments électroluminescents et des seconds éléments électroluminescents placés dans la périphérie des premiers éléments électroluminescents, le dispositif d'inspection comprenant : une source de lumière d'excitation qui génère une lumière d'excitation irradiée sur l'échantillon ; une caméra qui capture une fluorescence à partir de l'échantillon ; et une unité d'évaluation d'un dispositif de commande qui calcule la luminance relative de la fluorescence provenant du premier élément électroluminescent sur la base de la fluorescence provenant du premier élément électroluminescent et de la fluorescence provenant du second élément électroluminescent imagé par la caméra, et effectue une évaluation de réussite/échec du premier élément électroluminescent par comparaison d'une valeur calculée sur la base de la luminance absolue et de la luminance relative de la fluorescence provenant du premier élément électroluminescent avec une valeur seuil prescrite.
(JA)
検査装置は、第1の発光素子及び該第1の発光素子の周辺に配置された第2の発光素子を含む複数の発光素子が形成されたサンプルを検査する検査装置であって、サンプルに照射される励起光を生成する励起光源と、サンプルからの蛍光を撮像するカメラと、カメラによって撮像された第1の発光素子からの蛍光及び第2の発光素子からの蛍光に基づいて、第1の発光素子からの蛍光の相対輝度を算出し、第1の発光素子からの蛍光の絶対輝度及び相対輝度に基づく算出値と所定の閾値とを比較することにより、第1の発光素子の良否判定を行う制御装置の判定部と、を備える。
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