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1. WO2020194635 - INSPECTION DEVICE

Publication Number WO/2020/194635
Publication Date 01.10.2020
International Application No. PCT/JP2019/013466
International Filing Date 27.03.2019
IPC
G09F 9/00 2006.01
GPHYSICS
09EDUCATING; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
9Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
G01R 31/28 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
H01L 27/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
28including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
32with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes
H01L 51/50 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
H05B 33/10 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33Electroluminescent light sources
10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Applicants
  • シャープ株式会社 SHARP KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • 北村 吉隆 KITAMURA, Yoshitaka
  • 岸本 克彦 KISHIMOTO, Katsuhiko
Agents
  • 特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) INSPECTION DEVICE
(FR) DISPOSITIF D'INSPECTION
(JA) 検査装置
Abstract
(EN)
This inspection device (2) is provided with an inspection stage (4) on which an inspection target is placed, the inspection device comprising: a vacuum chuck mechanism (6) for vacuum-suctioning the inspection target on the inspection stage; and a foreign substance capture sheet (8) that is provided on the inspection stage and comes into contact with the inspection target by the vacuum-suctioning of the inspection target on the inspection stage.
(FR)
Ce dispositif d'inspection (2) est pourvu d'un étage d'inspection (4) sur lequel une cible d'inspection est placée, le dispositif d'inspection comprenant : un mécanisme de mandrin à vide (6) pour aspirer sous vide la cible d'inspection sur l'étage d'inspection ; et une feuille de capture de substance étrangère (8) qui est disposée sur l'étage d'inspection et entre en contact avec la cible d'inspection par aspiration sous vide de la cible d'inspection sur l'étage d'inspection.
(JA)
検査装置(2)は、被検査物を載置する検査ステージ(4)を備えた検査装置であって、前記被検査物を前記検査ステージ上に真空吸着する真空チャック機構(6)と、前記検査ステージ上への前記被検査物の真空吸着により、前記被検査物と接する、前記検査ステージ上の異物捕捉シート(8)とを備える。
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