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1. WO2020194632 - VAPOR DEPOSITION MASK AND METHOD FOR PRODUCING SAME

Publication Number WO/2020/194632
Publication Date 01.10.2020
International Application No. PCT/JP2019/013463
International Filing Date 27.03.2019
IPC
C23C 14/04 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
H01L 27/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
28including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
32with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes
H01L 51/50 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
H05B 33/10 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
BELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33Electroluminescent light sources
10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Applicants
  • シャープ株式会社 SHARP KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • 若槻 恭平 WAKATSUKI, Kyohei
  • 小林 勇毅 KOBAYASHI, Yuhki
Agents
  • 特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) VAPOR DEPOSITION MASK AND METHOD FOR PRODUCING SAME
(FR) MASQUE DE DÉPÔT EN PHASE VAPEUR ET PROCÉDÉ DE PRODUCTION D’UN TEL MASQUE
(JA) 蒸着マスクおよびその製造方法
Abstract
(EN)
A vapor deposition mask (10) is provided with: a mask frame (11); a plurality of strip-shaped vapor deposition sheets (15) that are each provided with a vapor deposition hole that allows vapor deposition particles to pass through toward a vapor deposition surface, and that are each fixed to the mask frame (11) at the two ends of the vapor deposition sheets in the longitudinal direction; a plurality of support sheets (12, 13) that are each fixed to the mask frame (11) at the two ends of the support sheets in the longitudinal direction, and that support the vapor deposition sheets (15); and inclined sections (22) that are provided to said two ends. At least one vapor deposition sheet out of the plurality of vapor deposition sheets (15) and/or at least one support sheet out of the plurality of support sheets (12, 13) is configured so that the two ends in the longitudinal direction are each fixed to the inclined section, and that a middle section of the longitudinal direction protrudes out so as to make a convex shape toward the vapor deposition surface side.
(FR)
L’invention concerne un masque de dépôt en phase vapeur (10) muni : d'un cadre de masque (11) ; d'une pluralité de feuilles de dépôt en phase vapeur en bande (15) qui sont chacune munies d'un trou de dépôt en phase vapeur qui permet le passage de particules de dépôt en phase vapeur en direction d’une surface de dépôt en phase vapeur, et qui sont chacune fixées au cadre de masque (11) aux deux extrémités des feuilles de dépôt en phase vapeur dans la direction longitudinale ; d’une pluralité de feuilles de support (12, 13) qui sont chacune fixées au cadre de masque (11) aux deux extrémités des feuilles de support dans la direction longitudinale, et qui soutiennent les feuilles de dépôt en phase vapeur (15) ; et de sections inclinées (22) qui sont disposées sur lesdites extrémités. Au moins une feuille de dépôt en phase vapeur parmi la pluralité de feuilles de dépôt en phase vapeur (15) et/ou au moins une feuille de support parmi la pluralité de feuilles de support (12, 13) est conçue de sorte que les deux extrémités dans la direction longitudinale sont chacune fixées à la section inclinée, et qu'une section centrale de la direction longitudinale fait saillie de façon à prendre une forme convexe en direction du côté surface de dépôt en phase vapeur.
(JA)
蒸着マスク(10)は、マスクフレーム(11)と、被蒸着面に対して蒸着粒子を通過させる蒸着孔をそれぞれ備え、長手方向の両端部で上記マスクフレーム(11)にそれぞれ固定された帯状の複数の蒸着シート(15)と、長手方向の両端部で、上記マスクフレーム(11)にそれぞれ固定されると共に、上記蒸着シート(15)を支持する複数のサポートシート(12、13)と、上記両端部に設けられた傾斜部(22)とを備え、上記複数の蒸着シート(15)のうち少なくとも1つの蒸着シートと、上記複数のサポートシート(12、13)のうち少なくとも1つのサポートシートとの少なくとも一方のシートでは、その長手方向の両端部が傾斜部に各々固定されて、その長手方向の中央部が、上記被蒸着面側に向かって凸形状となるように、突出するように構成されている。
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