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1. WO2020194572 - GAS LASER DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Publication Number WO/2020/194572
Publication Date 01.10.2020
International Application No. PCT/JP2019/013160
International Filing Date 27.03.2019
IPC
H01S 3/036 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering or replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Applicants
  • ギガフォトン株式会社 GIGAPHOTON INC. [JP]/[JP]
Inventors
  • 手井 大輔 TEI Daisuke
  • 若林 理 WAKABAYASHI Osamu
  • 田中 誠 TANAKA Makoto
  • 五十嵐 美和 IGARASHI Miwa
Agents
  • 森村靖男 MORIMURA Yasuo
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) GAS LASER DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
(FR) DISPOSITIF LASER À GAZ ET PROCÉDÉ DE FABRICATION DE DISPOSITIF ÉLECTRONIQUE
(JA) ガスレーザ装置、及び電子デバイスの製造方法
Abstract
(EN)
This gas laser device may be provided with: a chamber in which a laser gas is sealed; a window which is provided to the chamber and through which laser light is transmitted; an optical path pipe connected to the chamber by surrounding a position of the window in the chamber; a heated gas supply port through which heated purge gas is supplied into a closed space including a space in the optical path pipe; and an exhaust port through which gas in the closed space is discharged.
(FR)
L'invention concerne un dispositif laser à gaz qui peut comporter : une chambre dans laquelle un gaz laser est scellé ; une fenêtre qui est disposée sur la chambre et à travers laquelle une lumière laser est transmise ; un tuyau de trajet optique relié à la chambre en entourant une position de la fenêtre dans la chambre ; un orifice d'alimentation en gaz chauffé à travers lequel un gaz de purge chauffé est introduit dans un espace fermé comprenant un espace dans le tuyau de trajet optique ; et un orifice d'échappement à travers lequel le gaz dans l'espace fermé est déchargé.
(JA)
ガスレーザ装置は、レーザガスが封入されるチャンバと、チャンバに設けられレーザ光が透過するウィンドウと、チャンバにおけるウィンドウが設けられる位置を囲んでチャンバに接続される光路管と、光路管内の空間を含む閉空間内に加熱されたパージガスを供給する加熱ガス供給口と、閉空間内のガスを排気する排気口と、を備えてもよい。
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