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1. WO2020194310 - SEMICONDUCTOR FLIPPER

Publication Number WO/2020/194310
Publication Date 01.10.2020
International Application No. PCT/IL2020/050366
International Filing Date 26.03.2020
IPC
H01L 21/687 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
H01L 21/673 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
Applicants
  • YASKAWA EUROPE TECHNOLOGY LTD. [IL]/[IL]
Inventors
  • KLUMEL, Ran
  • ELMAN, Izia
Agents
  • EHRLICH, Gal
  • WATERMAN, Hadassa
  • MELNICK, Geoffrey, L.
Priority Data
62/824,35027.03.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SEMICONDUCTOR FLIPPER
(FR) DISPOSITIF DE RETOURNEMENT DE SEMI-CONDUCTEUR
Abstract
(EN)
A wafer flipping device for use in semiconductor processing, comprises a supported rotating assembly that receives a semiconductor work product on one side when in a first unrotated position, grips and aligns the work product, rotates with the semiconductor work product thereon into a rotated position, and releases the semiconductor work product from the rotated, position. The semiconductor work product may be any one of a range of different shapes and sizes and retractable pins are selected for the corresponding shape or size.
(FR)
La présente invention concerne un dispositif de retournement de tranche destiné à être utilisé dans le traitement de semi-conducteurs comprenant un ensemble rotatif soutenu qui reçoit un produit de travail semi-conducteur sur un côté lorsqu'il est dans une première position non rotative, saisit et aligne le produit de travail, tourne conjointement avec le produit de travail semi-conducteur dessus dans une position rotative, et libère le produit de travail semi-conducteur de la position rotative. Le produit de travail semi-conducteur peut avoir n'importe quelle forme et taille parmi un éventail de formes et de tailles différentes et des broches rétractables sont sélectionnées pour la forme ou la taille correspondante.
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