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1. WO2020193674 - METHOD FOR SLOT INSPECTION

Publication Number WO/2020/193674
Publication Date 01.10.2020
International Application No. PCT/EP2020/058464
International Filing Date 26.03.2020
IPC
G01B 21/14 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
10for measuring diameters
14internal diameters
G01B 21/20 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
20for measuring contours or curvatures, e.g. determining profile
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
CPC
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 21/14
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
10for measuring diameters
14internal diameters
G01B 21/20
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
20for measuring contours or curvatures, e.g. determining profile
Applicants
  • NIKON METROLOGY NV [BE]/[BE]
Inventors
  • DELAERE, Koen
Agents
  • DE CLERCQ & PARTNERS
Priority Data
19165822.828.03.2019EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD FOR SLOT INSPECTION
(FR) PROCÉDÉ POUR INSPECTION DE FENTE
Abstract
(EN)
Provided herein is a method for inspecting for a workpiece (100), the workpiece (100) comprising a slot (110) with a proximal end (P) and a distal end (D), the method comprising: receiving a dimensional model (210) of at least part of the workpiece comprising at least part of the slot (110) measured with a dimensional measurement device (300); determining a burnish region (220) of the slot (110) that is a continuous region having an essentially constant profile from the dimensional model (210); wherein the burnish region is determined by subdividing an inner mantle (214) into a plurality of slices (216) and generating and fitting a plane geometric shape (218a to 218e) to each of the respective slices (216a to 216e).
(FR)
L'invention concerne un procédé pour inspecter une pièce à travailler (100), la pièce à travailler (100) comprenant une fente (110) ayant une extrémité proximale (P) et une extrémité distale (D), lequel procédé comprend : la réception d'un modèle dimensionnel (210) d'au moins une partie de la pièce à travailler comprenant au moins une partie de la fente (110) mesurée avec un dispositif de mesure dimensionnelle (300) ; la détermination d'une région brunie (220) de la fente (110), qui est une région continue ayant un profil sensiblement constant, à partir du modèle dimensionnel (210) ; la région brunie étant déterminée par la subdivision d'un manteau interne (214) en une pluralité de tranches (216), et la génération et l'adaptation d'une forme géométrique plane (218a à 218e) à chacune des tranches respectives (216a à 216e).
Also published as
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