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1. WO2020193277 - MEASURING METHOD FOR INTERFEROMETRICALLY DETERMINING A SURFACE SHAPE

Publication Number WO/2020/193277
Publication Date 01.10.2020
International Application No. PCT/EP2020/057241
International Filing Date 17.03.2020
IPC
G01B 9/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
G01M 11/00 2006.01
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
G02B 5/18 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
18Diffracting gratings
B29D 11/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
CPC
G01B 2290/30
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
2290Aspects of interferometers not specifically covered by any group under G01B9/02
30Grating as beam-splitter
G01B 9/02039
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02034characterised by particularly shaped beams or wavefronts
02038Shaping the wavefront, e.g. generating a spherical wavefront
02039by matching the wavefront with a particular object surface shape
G01B 9/02055
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
G01M 11/005
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
005Testing of reflective surfaces, e.g. mirrors
G02B 27/0944
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
0938Using specific optical elements
0944Diffractive optical elements, e.g. gratings, holograms
Applicants
  • CARL ZEISS SMT GMBH [DE]/[DE]
Inventors
  • STIEPAN, Hans Michael
  • FUCHS, Sebastian
  • HETZLER, Jochen
Agents
  • SUMMERER, Christian
  • ZEUNER, Stefan
Priority Data
10 2019 204 096.926.03.2019DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) MESSVERFAHREN ZUR INTERFEROMETRISCHEN BESTIMMUNG EINER OBERFLÄCHENFORM
(EN) MEASURING METHOD FOR INTERFEROMETRICALLY DETERMINING A SURFACE SHAPE
(FR) PROCÉDÉ DE MESURE POUR LA DÉTERMINATION INTERFÉROMÉTRIQUE D'UNE FORME DE SURFACE
Abstract
(DE)
Ein Messverfahren zur interferometrischen Bestimmung einer Form einer Oberfläche (12) eines Testobjekts (14) umfasst ein Anordnen eines ersten diffraktiven optischen Elements (30, 130, 230) im Strahlengang einer Eingangswelle (18) zur Erzeugung einer ersten Prüfwelle (34) mit einer zumindest teilweise an eine Sollform der optischen Oberfläche angepassten Wellenfront, ein Erfassen eines mittels der ersten Prüfwelle nach Wechselwirkung mit der Oberfläche (12) des Testobjekts (14) erzeugten ersten Interferogramms, ein Anordnen eines weiteren diffraktiven optischen Elements (32, 232) anstelle des ersten diffraktiven optischen Elements im Strahlengang der Eingangswelle zur Erzeugung einer weiteren Prüfwelle mit einer zumindest teilweise an die Sollform der optischen Oberfläche (12) angepassten Wellenfront, wobei sich das erste diffraktive optische Element und das weitere diffraktive optische Element in der Konfiguration jeweiliger Beugungsstrukturen unterscheiden, ein Erfassen eines mittels der weiteren Prüfwelle nach Wechselwirkung mit der Oberfläche (12) des Testobjekts (14) erzeugten weiteren Interferogramms, sowie ein Bestimmen der Form der Oberfläche des Testobjekts durch Verrechnen der beiden Interferogramme.
(EN)
A measuring method for interferometrically determining a shape of a surface (12) of a test object (14) comprises the steps of arranging a first diffractive optical element (30, 130, 230) in the beam path of an input wave (18) for generating a first test wave (34) with a wavefront at least partly adapted to an intended shape of the optical surface, capturing a first interferogram generated by means of the first test wave following an interaction with the surface (12) of the test object (14), arranging a further diffractive optical element (32, 232) in place of the first diffractive optical element in the beam path of the input wave for generating a further test wave with a wavefront at least partly adapted to the intended shape of the optical surface (12), the first diffractive optical element and the further diffractive optical element differing in the configuration of the relevant diffraction structures, capturing a further interferogram generated by means of the further test wave following an interaction with the surface (12) of the test object (14), and determining the shape of the surface of the test object by combining the two interferograms by calculation.
(FR)
La présente invention concerne un procédé de mesure pour la détermination interférométrique d'une forme d'une surface (12) d'un objet de test (14), qui comprend un agencement d'un premier élément optique diffractif (30, 130, 230) dans le trajet optique d'une onde d'entrée (18) pour la génération d'une première onde d'essai (34) comportant un front d'onde au moins partiellement adapté à une forme de consigne de la surface optique, une détection d'un premier interférogramme généré au moyen de la première onde d'essai après interaction avec la surface (12) de l'objet de test (14), un agencement d'un autre élément optique diffractif (32, 232) à la place du premier élément optique diffractif dans le trajet optique de l'onde d'entrée pour la génération d'une autre onde d'essai comportant un front d'onde adapté au moins partiellement à la forme de consigne de la surface optique (12), le premier élément optique diffractif et l'autre élément optique diffractif se distinguant au niveau de la configuration des structures respectives de diffraction, une détection d'un autre interférogramme généré au moyen d'une autre onde d'essai après interaction avec la surface (12) de l'objet de test (14), ainsi qu'une détermination de la forme de surface de l'objet de test par compensation des deux interférogrammes.
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