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1. WO2020193263 - MEASUREMENT LIGHT SOURCE AND MEASURING ARRANGEMENT FOR DETECTING A REFLECTION SPECTRUM

Publication Number WO/2020/193263
Publication Date 01.10.2020
International Application No. PCT/EP2020/057177
International Filing Date 17.03.2020
IPC
G01N 21/55 2014.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
G01N 21/31 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
G01N 21/84 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
G01N 21/57 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
57Measuring gloss
CPC
G01N 2021/558
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
558Measuring reflectivity and transmission
G01N 2021/8411
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
8411Application to online plant, process monitoring
G01N 2021/8427
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
8422Investigating thin films, e.g. matrix isolation method
8427Coatings
G01N 21/31
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
G01N 21/55
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
G01N 21/57
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
57Measuring gloss
Applicants
  • CARL ZEISS SPECTROSCOPY GMBH [DE]/[DE]
Inventors
  • MARGRAF, Jörg
Agents
  • ENGEL, Christoph K.
  • RITTERMANN, Marco
Priority Data
10 2019 107 963.228.03.2019DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) MESSLICHTQUELLE SOWIE MESSANORDNUNG ZUM ERFASSEN EINES REFLEXIONSSPEKTRUMS
(EN) MEASUREMENT LIGHT SOURCE AND MEASURING ARRANGEMENT FOR DETECTING A REFLECTION SPECTRUM
(FR) SOURCE DE LUMIÈRE DE MESURE ET ENSEMBLE DE MESURE POUR LA DÉTECTION D'UN SPECTRE DE RÉFLEXION
Abstract
(DE)
Die vorliegende Erfindung betrifft eine Messlichtquelle zum Erzeugen von Messlicht mit einer gleichmäßigen räumlichen Beleuchtungsstärkeverteilung. Die Messlichtquelle umfasst einen massiven Block (01), in welchem ein Beleuchtungsraum (11), ein Lichtformungsraum (12) und ein Lichtaustrittsraum (13) jeweils als ein Hohlraum im Block (01) ausgebildet sind und eine diffus reflektierende Innenfläche besitzen. Der Beleuchtungsraum (11) mündet in den Lichtformungsraum (12). Der Lichtformungsraum (12) mündet in den Lichtaustrittsraum (13). In dem Beleuchtungsraum (11) ist mindestens eine Lichtquelle (07) zum Erzeugen von Licht zumindest teilweise angeordnet. Der Lichtaustrittsraum (13) weist einen Lichtaustritt (08) auf. Erfindungsgemäß sind eine Achse des Beleuchtungsraumes (11) und eine Achse des Lichtaustrittsraumes (13) beabstandet zueinander angeordnet. Der Lichtformungsraum (12) ist für eine Umkehr einer Lichtausbreitungsrichtung ausgebildet. Im Weiteren betrifft die Erfindung eine Messanordnung zum Erfassen zumindest eines absoluten Reflexionsspektrums einer Probe. Die Messanordnung dient insbesondere zur spektroskopischen Untersuchung von Oberflächen in Produktionsprozessen, um beispielsweise Farbe oder Glanz der Oberflächen zu bestimmen.
(EN)
The present invention relates to a measurement light source for generating measurement light with a uniform spatial illumination intensity distribution. The measurement light source comprises a solid block (01), in which an illumination space (11), a light-forming space (12) and a light exit space (13) are each formed as a hollow space in the block (01) and have a diffusely reflecting inner surface. The illumination space (11) opens into the light-forming space (12). The light-forming space (12) opens into the light exit space (13). At least one light source (07) is at least partially arranged in the illumination space (11) in order to generate light. The light exit space (13) has a light exit (08). According to the invention, an axis of the illumination space (11) and an axis of the light exit space (13) are arranged at a distance from one another. The light-forming space (12) is designed for a reversal of a light propagation direction. The invention also relates to a measuring arrangement for detecting at least an absolute reflection spectrum of a sample. The measuring arrangement is used in particular for the spectroscopic examination of surfaces in production processes in order to determine the colour or gloss of surfaces, for example.
(FR)
La présente invention concerne une source de lumière de mesure pour la génération de lumière de mesure ayant une répartition spatiale régulière de l'intensité d'illumination. La source de lumière de mesure comprend un bloc massif (01) dans lequel une chambre d'illumination (11), une chambre de formation de lumière (12) et une chambre de sortie de lumière (13) sont respectivement conçues sous la forme d'une cavité dans le bloc (01) et possèdent une surface interne à réflexion diffuse. La chambre d'illumination (11) s'ouvre dans la chambre de formation de lumière (12). La chambre de formation de lumière (12) s'ouvre dans la chambre de sortie de lumière (13). Au moins une source de lumière (07) pour générer de la lumière est au moins partiellement disposée dans la chambre d'illumination (11). La chambre de sortie de lumière (13) présente une sortie de lumière (08). Selon l'invention, un axe de la chambre d'illumination (11) et un axe de la chambre de sortie de lumière (13) sont disposés à distance l'un de l'autre. La chambre de formation de lumière (12) est conçue pour un retournement d'un sens de propagation de la lumière. En outre, l'invention concerne un ensemble de mesure pour la détection d'au moins un spectre de réflexion absolu d'un échantillon. L'ensemble de mesure sert en particulier à l'analyse spectroscopique de surfaces dans des procédés de production pour déterminer par exemple la couleur ou la brillance des surfaces.
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