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1. WO2020192349 - PREPARATION METHOD FOR MASK ASSEMBLY, AND MASK ASSEMBLY

Publication Number WO/2020/192349
Publication Date 01.10.2020
International Application No. PCT/CN2020/076946
International Filing Date 27.02.2020
IPC
C23C 14/04 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
C23C 14/24 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
Applicants
  • 京东方科技集团股份有限公司 BOE TECHNOLOGY GROUP CO., LTD. [CN]/[CN]
  • 成都京东方光电科技有限公司 CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. [CN]/[CN]
Inventors
  • 罗昶 LUO, Chang
  • 杨晓宇 YANG, Xiaoyu
  • 嵇凤丽 JI, Fengli
Agents
  • 北京天昊联合知识产权代理有限公司 TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS
Priority Data
201910229501.X25.03.2019CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) PREPARATION METHOD FOR MASK ASSEMBLY, AND MASK ASSEMBLY
(FR) PROCÉDÉ DE PRÉPARATION D'ENSEMBLE MASQUE ET ENSEMBLE MASQUE
(ZH) 掩膜组件的制备方法、掩膜组件
Abstract
(EN)
A preparation method for a mask assembly, comprising: after stretching and aligning a shielding layer (2), fixedly providing the shielding layer (2) on one side of a framework (1); forming at least one stretching aligning hole and at least one evaporation aligning mark in the fixed shielding layer (2) and the framework (1); after stretching and aligning a mask plate (3), fixedly providing the mask plate (3) on the side, away from the framework (1), of the shielding layer (2) according to the stretching aligning hole; and forming at least one evaporation aligning mark in the fixed mask plate (3) to obtain the mask assembly. Also disclosed are a preparation method for a mask assembly, and the mask assembly.
(FR)
L'invention concerne un procédé de préparation d'un ensemble masque, comprenant : après l'étirement et l'alignement d'une couche de protection (2), apposer de façon fixe la couche de protection (2) sur un côté d'un cadre (1) ; former au moins un trou d'alignement d'étirement et au moins une marque d'alignement d'évaporation dans la couche de protection fixe (2) et le cadre (1) ; après étirement et alignement d'une plaque de masque (3), apposer de façon fixe la plaque de masque (3) sur le côté, à l'opposé de la structure (1), de la couche de protection (2) selon le trou d'alignement d'étirement ; et former au moins une marque d'alignement d'évaporation dans la plaque de masque fixe (3) pour obtenir l'ensemble masque. L'invention concerne également un procédé de préparation de l'ensemble masque et l'ensemble masque.
(ZH)
一种掩膜组件的制备方法,包括:对遮挡层(2)进行拉伸和对位后,将遮挡层(2)固定设置在框架(1)的一侧;在固定设置后的遮挡层(2)和框架(1)中,开设至少一个拉伸对位孔和至少一个蒸镀对位标记;对掩膜版(3)进行拉伸和对位后,根据拉伸对位孔将掩膜版(3)固定设置在遮挡层(2)远离框架(1)的一侧;在固定设置后的掩膜版(3)中开设至少一个蒸镀对位标记,得到掩膜组件。还公开了一种掩膜组件的制备方法和一种掩膜组件。
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Latest bibliographic data on file with the International Bureau