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1. WO2020141691 - DEW CONDENSATION PREVENTION DEVICE OF CONSTANT TEMPERATURE/CONSTANT HUMIDITY CHAMBER

Publication Number WO/2020/141691
Publication Date 09.07.2020
International Application No. PCT/KR2019/011687
International Filing Date 10.09.2019
IPC
H01L 21/673 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
H01L 21/67 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
CPC
H01L 21/67
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
H01L 21/673
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
Applicants
  • (주)플렉시고 FLEXIGO [KR]/[KR]
Inventors
  • 이기용 LEE, Ki Yong
  • 문현봉 MOON, Hyeon Bong
Agents
  • 특허법인태동 TAEDONG PATENT & LAW FIRM
Priority Data
10-2019-000100504.01.2019KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) DEW CONDENSATION PREVENTION DEVICE OF CONSTANT TEMPERATURE/CONSTANT HUMIDITY CHAMBER
(FR) DISPOSITIF DE PRÉVENTION DE CONDENSATION DE ROSÉE D'UNE CHAMBRE À HUMIDITÉ/TEMPÉRATURE CONSTANTE
(KO) 항온항습 챔버의 결로 방지 장치
Abstract
(EN)
The present invention relates to a dew condensation prevention device of a constant temperature/constant humidity chamber, wherein the dew condensation prevention device can effectively remove water formation and dew condensation on the inner wall or outer wall of a viewing window of the constant temperature/constant humidity chamber by using multi-installed heating lines, and minimize the effect of the heating lines on the temperature and humidity environment inside the constant temperature/constant humidity chamber. To this end, a dew condensation prevention device of a constant temperature/constant humidity chamber comprises: a multi-layered glass constituting a viewing window which is on the outside of the constant temperature/constant humidity chamber for storing samples and components, and through which the inside of the constant temperature/constant humidity chamber can be viewed from outside; and at least two heating lines provided to remove water formation on an inner glass wall of the multi-layered glass, or remove dew condensation on an outer glass wall of the multi-layered glass.
(FR)
La présente invention concerne un dispositif de prévention de condensation de rosée d'une chambre à humidité/température constante, le dispositif de prévention de condensation de rosée pouvant éliminer efficacement la formation d'eau et la condensation de rosée sur la paroi interne ou la paroi externe d'une fenêtre de visualisation de la chambre à humidité/température constante à l'aide de lignes de chauffage multi-installées, et minimiser l'effet des lignes de chauffage sur l'environnement de température et d'humidité à l'intérieur de la chambre à humidité/température constante. A cet effet, un dispositif de prévention de condensation de rosée d'une chambre à humidité/température constante comprend : un verre multicouche constituant une fenêtre de visualisation qui se trouve à l'extérieur de la chambre à humidité/température constante pour stocker des échantillons et des composants, et à travers lequel l'intérieur de la chambre à humidité/température constante peut être visualisé depuis l'extérieur ; et au moins deux lignes de chauffage fournies pour éliminer la formation d'eau sur une paroi de verre interne du verre multicouche, ou pour éliminer la condensation de rosée sur une paroi de verre externe du verre multicouche.
(KO)
본 발명은 항온항습 챔버의 견시창 내벽 또는 외벽에 발생하는 물 맺힘과 결로를 다중으로 설치되는 열선을 이용하여 효과적으로 제거함과 아울러 항온항습 챔버 내부의 온도 및 습도 환경에 열선이 주는 영향을 최소화할 수 있도록 된 항온항습 챔버의 결로 방지 장치에 관한 것이다. 이를 위해 항온항습 챔버의 결로 방지 장치는 시료 및 부품이 보관되는 항온항습 챔버의 외측에 상기 항온항습 챔버의 내부를 들여다 볼 수 있는 견시창을 이루는 다중 글래스, 및 상기 다중 글래스의 인너 글래스 내벽에 발생된 물 맺힘을 제거하거나, 상기 다중 글래스의 아웃 글래스 외벽에 발생된 결로를 제거할 수 있도록 적어도 둘 이상 구비되는 열선을 포함한다.
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