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1. WO2020141094 - A CHARGED PARTICLE BEAM SYSTEM FOR SCANNING A SAMPLE

Publication Number WO/2020/141094
Publication Date 09.07.2020
International Application No. PCT/EP2019/086484
International Filing Date 19.12.2019
IPC
H01J 37/28 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron- or ion-diffraction tubes
28with scanning beams
G01N 23/2251 2018.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
22by measuring secondary emission from the material
225using electron or ion microprobes
2251using incident electron beams, e.g. scanning electron microscopy
G01R 31/28 2006.1
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
G01R 31/307 2006.1
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
302Contactless testing
305using electron beams
307of integrated circuits
CPC
G01N 2223/102
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
10Different kinds of radiation or particles
102beta or electrons
G01N 2223/351
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
30Accessories, mechanical or electrical features
351prohibiting charge accumulation on sample substrate
G01N 2223/611
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
60Specific applications or type of materials
611patterned objects; electronic devices
G01N 2223/646
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
60Specific applications or type of materials
646flaws, defects
G01N 23/06
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
02by transmitting the radiation through the material
06and measuring the absorption
G01N 23/203
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
20by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
203Measuring back scattering
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL]
Inventors
  • LYONS, Adam
  • WALLOW, Thomas I.
Agents
  • PETERS, John Antoine
Priority Data
62/787,12131.12.2018US
62/943,69504.12.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) A CHARGED PARTICLE BEAM SYSTEM FOR SCANNING A SAMPLE
(FR) SYSTÈME DE FAISCEAU DE PARTICULES CHARGÉES POUR BALAYER UN ÉCHANTILLON
Abstract
(EN)
A method for scanning a sample by a charged particle beam tool is provided. The method includes providing the sample having a scanning area including a plurality of unit areas, scanning a unit area of the plurality of unit areas, blanking a next unit area of the plurality of unit areas adjacent to the scanned unit area, and performing the scanning and the blanking the plurality of unit areas until all of the unit areas are scanned.
(FR)
L'invention concerne un procédé de balayage d'un échantillon par un outil à faisceau de particules chargées. Le procédé comprend les étapes consistant à fournir l'échantillon ayant une zone de balayage comprenant une pluralité de zones unitaires, à balayer une zone unitaire de la pluralité de zones unitaires, à supprimer une zone unitaire suivante de la pluralité de zones unitaires adjacentes à la zone d'unité balayée, et à effectuer le balayage et la suppression de la pluralité de zones unitaires jusqu'à ce que toutes les zones unitaires soient balayées.
Also published as
IL284445
Latest bibliographic data on file with the International Bureau