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1. WO2020140776 - METHOD FOR PREPARING MASK, MASK, AND EVAPORATION METHOD USING MASK

Publication Number WO/2020/140776
Publication Date 09.07.2020
International Application No. PCT/CN2019/127116
International Filing Date 20.12.2019
IPC
C23C 14/04 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
C23C 14/24 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
CPC
C23C 14/042
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
042using masks
C23C 14/24
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
Applicants
  • 京东方科技集团股份有限公司 BOE TECHNOLOGY GROUP CO., LTD. [CN]/[CN]
Inventors
  • 朱海彬 ZHU, Haibin
  • 董学 DONG, Xue
  • 袁广才 YUAN, Guangcai
  • 王伟杰 WANG, Weijie
  • 张峰杰 ZHANG, Fengjie
Agents
  • 中科专利商标代理有限责任公司 CHINA SCIENCE PATENT & TRADEMARK AGENT LTD.
Priority Data
201910008043.704.01.2019CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) METHOD FOR PREPARING MASK, MASK, AND EVAPORATION METHOD USING MASK
(FR) PROCÉDÉ POUR LA PRÉPARATION DE MASQUE, MASQUE ET PROCÉDÉ D'ÉVAPORATION UTILISANT LE MASQUE
(ZH) 掩膜板的制备方法、掩膜板和利用掩膜板的蒸镀方法
Abstract
(EN)
Disclosed are a method for preparing a mask, the mask and an evaporation method using the mask. The preparation method comprises: providing a frame and a mask body; and fixing the mask body and the frame together to form a mask under the conditions where at least one of the mask body and the frame is at a preset temperature, such that at an operating temperature that differs from the preset temperature, the mask body is stretched by the frame, due to thermal deformation, to enable the mask body to generate a preset amount of elastic deformation.
(FR)
L'invention concerne un procédé pour la préparation d'un masque, le masque et un procédé d'évaporation utilisant le masque. Le procédé de préparation comprend : l'utilisation d'un cadre et d'un corps de masque ; et la fixation du corps de masque et du cadre l'un à l'autre pour former un masque dans des conditions où au moins l'un du corps de masque et du cadre est à une température prédéfinie, de façon telle qu'à une température de fonctionnement qui diffère de la température prédéfinie, le corps de masque est étiré par le cadre, en raison d'une déformation thermique, pour permettre au corps de masque de générer une amplitude prédéfinie de déformation élastique.
(ZH)
一种掩膜板的制备方法、掩膜板和利用掩膜板的蒸镀方法,所述制备方法包括:提供框架和掩膜板本体;以及在掩膜板本体和框架中的至少一个在预定温度下的情况下,将掩膜板本体与框架固定在一起以形成掩膜板,使得在不同于所述预定温度的使用温度下,通过热变形引起的框架对掩膜板本体的拉伸,使掩膜板本体产生预定的弹性变形量。
Also published as
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