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1. WO2020138809 - INSPECTION DEVICE USING TERAHERTZ WAVE

Publication Number WO/2020/138809
Publication Date 02.07.2020
International Application No. PCT/KR2019/017850
International Filing Date 17.12.2019
IPC
G01N 21/3581 2014.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
G01N 21/27 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
CPC
G01N 21/27
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
G01N 21/3581
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
Applicants
  • (주)미래컴퍼니 MEERECOMPANY INC. [KR]/[KR]
Inventors
  • 김찬웅 KIM, Chan Woong
  • 이예솔 LEE, Ye Sol
  • 차병찬 CHA, Byeong Chan
Agents
  • 특허법인더웨이브 THE WAVE IP LAW FIRM
Priority Data
10-2018-017209528.12.2018KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) INSPECTION DEVICE USING TERAHERTZ WAVE
(FR) DISPOSITIF D'INSPECTION UTILISANT UNE ONDE THZ
(KO) 테라헤르츠파를 이용한 검사장치
Abstract
(EN)
The present invention relates to an inspection device using a terahertz wave, comprising: a transfer table having a seating portion on which at least one inspection object is seated, and forming a transfer path along which the inspection object is transferred; a terahertz light source, provided above the transfer path, for irradiating a terahertz wave to the inspection object being transferred along the transfer path; and a terahertz camera for receiving the terahertz wave irradiated from the terahertz light source and transmitted through the inspection object, wherein the entire area or a partial area of the seating portion is made of a material that transmits a terahertz wave.
(FR)
La présente invention concerne un dispositif d'inspection utilisant une onde Térahertz, comprenant : une table de transfert ayant une partie d'assise sur laquelle repose au moins un objet d'inspection, et formant un trajet de transfert le long duquel l'objet d'inspection est transféré ; une source de lumière Térahertz, disposée au-dessus du trajet de transfert, pour irradier une onde Térahertz vers l'objet d'inspection qui est transféré le long du trajet de transfert ; et une caméra Térahertz pour recevoir l'onde Térahertz irradiée à partir de la source de lumière Térahertz et transmise à travers l'objet d'inspection, la zone entière ou une zone partielle de la partie d'assise étant constituée d'un matériau qui transmet une onde Térahertz.
(KO)
본 발명은 테라헤르츠파를 이용한 검사장치에 관한 것으로서, 적어도 하나의 검사대상물이 안착되는 안착부를 가지며, 상기 검사대상물이 이송되는 이송 경로를 형성하는 이송 테이블; 상기 이송 경로의 상방에 마련되어, 상기 이송 경로를 따라 이송되는 상기 검사대상물에 테라헤르츠파를 조사하는 테라헤르츠 광원; 및 상기 테라헤르츠 광원으로부터 조사되어 상기 검사대상물을 투과한 테라헤르츠파를 수신하는 테라헤르츠 카메라를 포함하며, 상기 안착부의 전체 또는 일부 영역은 테라헤르츠파가 투과되는 재질로 이루어진 것을 특징으로 한다.
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