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1. WO2020137991 - SUBSTRATE TRANSPORTING ROBOT AND AUTOMATED TEACHING METHOD

Publication Number WO/2020/137991
Publication Date 02.07.2020
International Application No. PCT/JP2019/050403
International Filing Date 23.12.2019
IPC
H01L 21/677 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
B25J 9/163
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
16Programme controls
1628characterised by the control loop
163learning, adaptive, model based, rule based expert control
B25J 9/1656
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
16Programme controls
1656characterised by programming, planning systems for manipulators
B25J 9/1692
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
16Programme controls
1679characterised by the tasks executed
1692Calibration of manipulator
B25J 9/1694
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
16Programme controls
1694characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
B65G 2203/044
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2203Indexing code relating to control or detection of the articles or the load carriers during conveying
04Detection means
042Sensors
044Optical
B65G 47/905
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47Article or material-handling devices associated with conveyors; Methods employing such devices
74Feeding, transfer, or discharging devices of particular kinds or types
90Devices for picking-up and depositing articles or materials
905Control arrangements
Applicants
  • 川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP]/[JP]
  • カワサキロボティクス(アメリカ合衆国),インク. KAWASAKI ROBOTICS (USA), INC. [US]/[US]
Inventors
  • 吉田 雅也 YOSHIDA, Masaya
  • 中原 一 NAKAHARA, Hajime
  • タン マーク ユィンシン TANG, Mark Yun-Hsin
Agents
  • 特許業務法人 有古特許事務所 ARCO PATENT & TRADEMARK ATTORNEYS
Priority Data
16/23331427.12.2018US
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE TRANSPORTING ROBOT AND AUTOMATED TEACHING METHOD
(FR) ROBOT DE TRANSPORT DE SUBSTRAT ET PROCÉDÉ D'APPRENTISSAGE AUTOMATISÉ
(JA) 基板搬送ロボット及び自動教示方法
Abstract
(EN)
This substrate transporting robot (1) is configured such that: when viewed in a plan view, first and second sensors (20, 30) are provided to a hand so that a plan view intersection point (LC) of optical axes of emitted detection light is positioned at a predetermined position on a substrate (S) when the substrate is held by the hand (14); and a control device (40) operates an arm (12) to scan a target (52) arranged at a teaching position with the first and second sensors, and acquires the teaching position when the target is positioned at the plan view intersection point of the optical axes.
(FR)
L'invention concerne un robot de transport de substrat (1) qui est configuré de telle sorte que : lorsqu'il est observé dans une vue en plan, des premier et second capteurs (20, 30) sont fournis à une main de telle sorte qu'un point d'intersection de vue en plan (LC) d'axes optiques de lumière de détection émise est positionné au niveau d'une position prédéterminée sur un substrat (S) lorsque le substrat est tenu par la main (14) ; et un dispositif de commande (40) actionne un bras (12) pour balayer une cible (52) agencée au niveau d'une position d'apprentissage avec les premier et second capteurs, et acquiert la position d'apprentissage lorsque la cible est positionnée au niveau du point d'intersection de vue en plan des axes optiques.
(JA)
基板搬送ロボット(1)は、平面視において、射出される検出光の光軸の平面視交点(LC)が、ハンド(14)で基板(S)を保持した場合における前記基板の所定位置上に位置するように、第1および第2センサ(20、30)が前記ハンドに設けられ、制御装置(40)が、アーム(12)を動作させ、教示位置に設置されたターゲット(52)を前記第1および第2センサで走査し、前記ターゲットが前記光軸の平面視交点に位置したときに前記教示位置を取得するように構成されている。
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