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1. WO2020137119 - MAGNETIC SENSOR AND METHOD FOR PRODUCING MAGNETIC SENSOR

Publication Number WO/2020/137119
Publication Date 02.07.2020
International Application No. PCT/JP2019/041359
International Filing Date 21.10.2019
IPC
G01R 33/02 2006.1
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
33Arrangements or instruments for measuring magnetic variables
02Measuring direction or magnitude of magnetic fields or magnetic flux
H01L 43/00 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
43Devices using galvano-magnetic or similar magnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
CPC
G01R 33/02
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
33Arrangements or instruments for measuring magnetic variables
02Measuring direction or magnitude of magnetic fields or magnetic flux
H01L 43/00
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
43Devices using galvano-magnetic or similar magnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
Applicants
  • 昭和電工株式会社 SHOWA DENKO K.K. [JP]/[JP]
Inventors
  • 篠 竜徳 SHINO, Tatsunori
  • 遠藤 大三 ENDO, Daizo
Agents
  • 古部 次郎 FURUBE, Jiro
  • 加藤 謹矢 KATO, Kinya
Priority Data
2018-24550127.12.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) MAGNETIC SENSOR AND METHOD FOR PRODUCING MAGNETIC SENSOR
(FR) CAPTEUR MAGNÉTIQUE ET PROCÉDÉ DE PRODUCTION D'UN CAPTEUR MAGNÉTIQUE
(JA) 磁気センサおよび磁気センサの製造方法
Abstract
(EN)
This magnetic sensor (1) is provided with: a non-magnetic substrate (10); and a sensing element (31) which is provided with a plurality of soft magnetic layers (105) (a lower soft magnetic layer (105a) and an upper soft magnetic layer (105b)) that are laminated on the substrate, and a conductor layer (106) that is arranged between the plurality of soft magnetic layers and has a high electrical conductivity in comparison to the soft magnetic layers, and which has a long-side direction and a short-side direction, while having uniaxial magnetic anisotropy in a direction that intersects with the long-side direction, and senses a magnetic field by means of a magnetic impedance effect.
(FR)
L'invention concerne un capteur magnétique (1) comprenant : un substrat non magnétique (10) ; et un élément de détection (31) comprenant une pluralité de couches magnétiques souples (105) (une couche magnétique souple inférieure (105a) et une couche magnétique souple supérieure (105b)) stratifiées sur le substrat, et une couche conductrice (106) disposée entre la pluralité de couches magnétiques souples et présentant une conductivité électrique élevée par rapport aux couches magnétiques souples, et qui présente une direction de côté long et une direction de côté court, tout en présentant une anisotropie magnétique uni-axiale dans une direction qui croise la direction de côté long, et détecte un champ magnétique au moyen d'un effet d'impédance magnétique.
(JA)
磁気センサ(1)は、非磁性の基板(10)と、基板上に積層される複数の軟磁性体層(105){下層軟磁性体層(105a)、上層軟磁性体層(105b)}と、複数の軟磁性体層の間に積層され軟磁性体層と比べて導電性が高い導電体層(106)とを備え、長手方向と短手方向とを有し、長手方向と交差する方向に一軸磁気異方性を有し、磁気インピーダンス効果により磁界を感受する感受素子(31)とを備える。
Also published as
Latest bibliographic data on file with the International Bureau