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1. WO2020136634 - PORT ARRANGEMENT FOR NONCONTACT SUPPORT PLATFORM

Publication Number WO/2020/136634
Publication Date 02.07.2020
International Application No. PCT/IL2019/051337
International Filing Date 08.12.2019
IPC
B65G 49/06 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
B65G 2249/04
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2249Aspects relating to conveying systems for the manufacture of fragile sheets
04Arrangements of vacuum systems or suction cups
B65G 2249/045
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2249Aspects relating to conveying systems for the manufacture of fragile sheets
04Arrangements of vacuum systems or suction cups
045Details of suction cups suction cups
B65G 49/065
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
063Transporting devices for sheet glass
064in a horizontal position
065supported partially or completely on fluid cushions, e.g. a gas cushion
B65G 51/03
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
51Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
03over a flat surface or in troughs
Applicants
  • CORE FLOW LTD. [IL]/[IL]
Inventors
  • GORRA, Rina
Agents
  • SIERADZKI, Doron
Priority Data
16/233,14027.12.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PORT ARRANGEMENT FOR NONCONTACT SUPPORT PLATFORM
(FR) AGENCEMENT D'ORIFICES POUR PLATEFORME DE SUPPORT SANS CONTACT
Abstract
(EN)
A noncontact support platform system is configured to support a workpiece and includes pressure ports and vacuum ports that are interspersed on a top surface of a table. The ports are arranged along columns such that a pressure port alternates with a vacuum port along each column. The columns include at least one longitudinal column that is oriented substantially parallel to a direction of motion of the workpiece. Mutually parallel rotated columns are each oriented at an oblique angle to the direction of motion. At least one transition column is located between a longitudinal column and its proximal rotated column and has an orientation that is intermediate between the two columns that are adjacent to that transition column. Each vacuum port and pressure port is located at an intersection of a column with a row that is oriented substantially perpendicular to the direction of motion.
(FR)
L'invention concerne un système de plateforme de support sans contact qui est conçu afin de soutenir une pièce à travailler et qui comprend des orifices de pression et des orifices d'aspiration qui sont intercalés sur une surface supérieure d'une table. Les orifices sont disposés le long de colonnes de telle sorte qu'un orifice de pression alterne avec un orifice d'aspiration le long de chaque colonne. Les colonnes comprennent au moins une colonne longitudinale qui est orientée sensiblement parallèlement à une direction de mouvement de la pièce à travailler. Des colonnes tournantes mutuellement parallèles sont chacune orientées selon un angle oblique par rapport à la direction de mouvement. Au moins une colonne de transition est située entre une colonne longitudinale et sa colonne tournante proximale et présente une orientation qui est intermédiaire entre les deux colonnes qui sont adjacentes à cette colonne de transition. Chaque orifice d'aspiration et chaque orifice de pression est situé au niveau d'une intersection d'une colonne avec une rangée qui est orientée sensiblement perpendiculairement à la direction de mouvement.
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