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1. WO2020136346 - METHOD FOR CHARACTERISING A SAMPLE BY PHASE IMAGING

Publication Number WO/2020/136346
Publication Date 02.07.2020
International Application No. PCT/FR2019/053284
International Filing Date 23.12.2019
IPC
G01N 21/956 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
95characterised by the material or shape of the object to be examined
956Inspecting patterns on the surface of objects
G01J 9/00 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
9Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
G01N 21/41 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
41Refractivity; Phase-affecting properties, e.g. optical path length
G02B 21/36 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
36arranged for photographic purposes or projection purposes
G02B 21/08 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
06Means for illuminating specimen
08Condensers
CPC
G01N 2021/8864
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
8854Grading and classifying of flaws
8861Determining coordinates of flaws
8864Mapping zones of defects
G01N 21/41
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
41Refractivity; Phase-affecting properties, e.g. optical path length
G01N 21/956
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
95characterised by the material or shape of the object to be examined
956Inspecting patterns on the surface of objects
G02B 21/082
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
06Means for illuminating specimens
08Condensers
082for incident illumination only
G02B 21/086
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
06Means for illuminating specimens
08Condensers
086for transillumination only
G02B 21/14
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
06Means for illuminating specimens
08Condensers
14affording illumination for phase-contrast observation
Applicants
  • COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES [FR]/[FR]
  • HORIBA ABX SAS [FR]/[FR]
Inventors
  • LE CARDINAL DE KERNIER, Isaure
Agents
  • LE GOALLER, Christophe
  • COLOMBO, Michel
  • DUPONT, Jean-Baptiste
Priority Data
187418726.12.2018FR
Publication Language French (FR)
Filing Language French (FR)
Designated States
Title
(EN) METHOD FOR CHARACTERISING A SAMPLE BY PHASE IMAGING
(FR) PROCÉDÉ DE CARACTÉRISATION D'UN ÉCHANTILLON PAR IMAGERIE DE PHASE
Abstract
(EN)
Method for characterising a sample (10), lying in a sample plane, the method comprising the following steps: a) illuminating the sample using a light source (11, 11'), such that, under the effect of the illumination, an image sensor (20) is exposed to an exposing light wave (14) that is transmitted or reflected by the sample; b) obtaining a plurality of defocused images (Iz) of the sample; c) from the images obtained in step b), computing, at various radial coordinates (r), in the detection plane (P), an axial variation; d) from the axial variation computed in step c), obtaining a phase image (Iφ); e) characterising the sample using the obtained phase image (Iφ).
(FR)
Procédé de caractérisation d'un échantillon (10), s'étendant selon un plan d'échantillon, le procédé comportant les étapes suivantes : a) illumination de l'échantillon à l'aide d'une source de lumière (11, 11'), de telle sorte que sous l'effet de l'illumination, un capteur d'image (20) est exposé à une onde lumineuse d'exposition (14) transmise ou réfléchie par l'échantillon, b) obtention de plusieurs images défocalisées (Iz) de l'échantillon c) à partir des images obtenues lors de l'étape b), calcul, en différentes coordonnées radiales (r), selon le plan de détection (P), d'une variation axiale; d) à partir de la variation axiale calculée lors de l'étape c), obtention d'une image de phase (Iφ); e) caractérisation de l'échantillon à partir de l'image de phase obtenue (Iφ).
Also published as
Latest bibliographic data on file with the International Bureau