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1. WO2020134327 - TERAHERTZ DETECTOR AND MANUFACTURING METHOD THEREFOR

Publication Number WO/2020/134327
Publication Date 02.07.2020
International Application No. PCT/CN2019/110339
International Filing Date 10.10.2019
IPC
H01L 37/02 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
37Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using Nernst-Ettinghausen effect; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
02using thermal change of dielectric constant, e.g. working above and below the Curie point
G01J 5/12 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5Radiation pyrometry
10using electric radiation detectors
12using thermoelectric elements, e.g. thermocouples
CPC
G01J 2005/126
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5Radiation pyrometry
10using electric radiation detectors
12using thermoelectric elements, e.g. thermocouples
126Thermoelectric black plate and thermocouple
G01J 5/12
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5Radiation pyrometry
10using electric radiation detectors
12using thermoelectric elements, e.g. thermocouples
H01L 37/02
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
37Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using Nernst-Ettinghausen effect; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
02using thermal change of dielectric constant, e.g. working above and below Curie point ; , e.g. pyroelectric devices
H01L 37/025
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
37Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using Nernst-Ettinghausen effect; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
02using thermal change of dielectric constant, e.g. working above and below Curie point ; , e.g. pyroelectric devices
025Selection of materials
Applicants
  • 同方威视技术股份有限公司 NUCTECH COMPANY LIMITED [CN]/[CN]
  • 清华大学 TSINGHUA UNIVERSITY [CN]/[CN]
Inventors
  • 赵自然 ZHAO, Ziran
  • 王迎新 WANG, Yingxin
  • 陈猛 CHEN, Meng
  • 马旭明 MA, Xuming
Agents
  • 中科专利商标代理有限责任公司 CHINA SCIENCE PATENT & TRADEMARK AGENT LTD.
Priority Data
201811631501.428.12.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) TERAHERTZ DETECTOR AND MANUFACTURING METHOD THEREFOR
(FR) DÉTECTEUR TÉRAHERTZ ET SON PROCÉDÉ DE FABRICATION
(ZH) 太赫兹探测器及其制造方法
Abstract
(EN)
A terahertz detector and a manufacturing method therefor. The terahertz detector comprises a substrate (2) and at least one detection unit. Each detection unit comprises: a channel material (1), the channel material (1) being provided on the substrate (2); two electrodes (3, 4), the two electrodes (3, 4) being in ohmic contact with the two ends of the channel material (1) in the longitudinal direction; and three-dimensional graphene (5), the three-dimensional graphene (5) being directly or indirectly in thermal contact with the channel material (1). The detector solves the problem of insufficient absorption of terahertz waves by the channel material (1) by using the three-dimensional graphene (5) as an absorber, so that the response sensitivity of the detector is effectively improved.
(FR)
La présente invention concerne un détecteur térahertz et son procédé de fabrication. Le détecteur térahertz comprend un substrat (2) et au moins une unité de détection. Chaque unité de détection comprend : un matériau de canal (1), le matériau de canal (1) étant disposé sur le substrat (2); deux électrodes (3, 4), les deux électrodes (3, 4) étant en contact ohmique avec les deux extrémités du matériau de canal (1) dans la direction longitudinale; et du graphène tridimensionnel (5), le graphène tridimensionnel (5) étant directement ou indirectement en contact thermique avec le matériau de canal (1). Le détecteur résout le problème d'insuffisance d'absorption d'ondes térahertz par le matériau de canal (1) en utilisant le graphène tridimensionnel (5) comme absorbeur, si bien que la sensibilité de réponse du détecteur est efficacement améliorée.
(ZH)
一种太赫兹探测器及其制造方法,太赫兹探测器包括基底(2);以及至少一个探测单元,每个所述探测单元均包括:沟道材料(1),所述沟道材料(1)设置在所述基底(2)上,两个电极(3, 4),两个所述电极(3, 4)分别与所述沟道材料(1)的纵向方向的两端欧姆接触,和三维石墨烯(5),所述三维石墨烯(5)与所述沟道材料(1)直接或间接地热接触。探测器通过将三维石墨烯(5)作为吸收体,解决了沟道材料(1)对太赫兹波吸收不足的问题,有效地提高了探测器的响应灵敏度。
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