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1. WO2020132961 - APPEARANCE DEFECT INSPECTION METHOD AND DEVICE

Publication Number WO/2020/132961
Publication Date 02.07.2020
International Application No. PCT/CN2018/123967
International Filing Date 26.12.2018
IPC
G01N 21/88 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
CPC
G01N 21/01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
01Arrangements or apparatus for facilitating the optical investigation
G01N 21/88
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
G01N 21/95
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
95characterised by the material or shape of the object to be examined
Applicants
  • 合刃科技(深圳)有限公司 HEREN KEJI (SHENZHEN) LLC [CN]/[CN]
Inventors
  • 闫静 YAN, Jing
  • 舒远 SHU, Yuan
  • 王星泽 WANG, Xingze
Agents
  • 广州三环专利商标代理有限公司 SCIHEAD IP LAW FIRM
Priority Data
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) APPEARANCE DEFECT INSPECTION METHOD AND DEVICE
(FR) PROCÉDÉ ET DISPOSITIF D'INSPECTION DE DÉFAUTS D'ASPECT
(ZH) 外观缺陷检测方法及装置
Abstract
(EN)
Disclosed is an appearance defect inspection device, comprising at least one imaging module (10A, 10B, 10C, 10D) with a photographing direction, and a polarization angle adjustment module (20A, 20B, 20C, 20D) arranged within a photographing angle of view of each of the imaging modules (10A, 10B, 10C, 10D), wherein the polarization angle adjustment module (20A, 20B, 20C, 20D) is used for adjusting a polarization angle of light that enters the imaging module (10A, 10B, 10C, 10D) and is reflected by a surface of an inspection material; and the imaging module (10A, 10B, 10C, 10D) is used for photographing, at at least one polarization angle, an appearance image of the surface of the inspection material corresponding to the polarization angle. The inspection device further comprises a processor (30, 1002) connected to the imaging modules (10A, 10B, 10C, 10D) and used for acquiring the appearance images collected by the at least one imaging module (10A, 10B, 10C, 10D) and corresponding to the polarization angle, for performing projection correction and/or image registration on the appearance images to obtain a set of normalized appearance images corresponding to the position of the inspection material, and for inspecting a surface defect of the inspection material according to the set of the normalized appearance images. The beneficial effect thereof is that the accuracy of appearance defect inspection can be improved.
(FR)
L'invention concerne un dispositif d'inspection de défauts d'aspect, comprenant au moins un module d'imagerie (10A, 10B, 10C, 10D) présentant une direction de photographie, et un module d'ajustement de l'angle de polarisation (20A, 20B, 20C, 20D) disposé dans l'angle de prise de vue de chacun des modules d'imagerie (10A, 10B, 10C, 10D), le module d'ajustement de l'angle de polarisation (20A, 20B, 20C, 20D) étant utilisé pour ajuster l'angle de polarisation de la lumière qui pénètre dans le module d'imagerie (10A, 10B, 10C, 10D) et qui est réfléchie par une surface d'un matériau à inspecter ; et le module d'imagerie (10A, 10B, 10C, 10D) est utilisé pour photographier, selon au moins un angle de polarisation, une image de l'aspect de la surface du matériau à inspecter correspondant à l'angle de polarisation. Le dispositif d'inspection comprend en outre un processeur (30, 1002) connecté aux modules d'imagerie (10A, 10B, 10C, 10D) et utilisé pour acquérir les images d'aspect recueillies par le ou les modules d'imagerie (10A, 10B, 10C, 10D) et correspondant à l'angle de polarisation, pour effectuer une correction de projection et/ou un enregistrement d'image sur les images d'aspect afin d'obtenir un ensemble d'images d'aspect normalisées correspondant à la position du matériau à inspecter, et pour inspecter un défaut de surface du matériau à inspecter en fonction de l'ensemble d'images d'aspect normalisées. L'avantage de la présente invention est que la précision de l'inspection des défauts d'aspect peut être améliorée.
(ZH)
一种外观缺陷检测装置,包括至少一个拍摄方向的成像模块(10A、10B、10C、10D),设置于成像模块(10A、10B、10C、10D)的拍摄视角中的偏振角度调节模块(20A、20B、20C、20D);偏振角度调节模块(20A、20B、20C、20D)用于调节进入成像模块(10A、10B、10C、10D)的检材表面反射光的偏振角度;成像模块(10A、10B、10C、10D)用于拍摄至少一个偏振角度下的与偏振角度对应的检材表面的外观图像;检测装置还包括与成像模块(10A、10B、10C、10D)连接的处理器(30、1002),用于获取至少一个成像模块(10A、10B、10C、10D)采集的与偏振角度对应的外观图像,对外观图像进行投影校正和/或图像配准,得到与检材位置对应的规格化的外观图像的集合,根据规格化的外观图像的集合检测检材的表面缺陷。有益效果:可提高外观缺陷检测的准确度。
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