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1. WO2020132960 - DEFECT DETECTION METHOD AND DEFECT DETECTION SYSTEM

Publication Number WO/2020/132960
Publication Date 02.07.2020
International Application No. PCT/CN2018/123966
International Filing Date 26.12.2018
IPC
G01N 21/88 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
CPC
G01N 2021/0112
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
01Arrangements or apparatus for facilitating the optical investigation
0106General arrangement of respective parts
0112Apparatus in one mechanical, optical or electronic block
G01N 2021/0162
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
01Arrangements or apparatus for facilitating the optical investigation
0162using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing
G01N 2021/8874
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
8854Grading and classifying of flaws
8874Taking dimensions of defect into account
G01N 21/01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
01Arrangements or apparatus for facilitating the optical investigation
G01N 21/88
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
G01N 21/8851
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
Applicants
  • 合刃科技(深圳)有限公司 HEREN KEJI (SHENZHEN) LLC [CN]/[CN]
Inventors
  • 王星泽 WANG, Xingze
  • 舒远 SHU, Yuan
Agents
  • 广州三环专利商标代理有限公司 SCIHEAD IP LAW FIRM
Priority Data
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) DEFECT DETECTION METHOD AND DEFECT DETECTION SYSTEM
(FR) PROCÉDÉ DE DÉTECTION DE DÉFAUT ET SYSTÈME DE DÉTECTION DE DÉFAUT
(ZH) 缺陷检测方法及缺陷检测系统
Abstract
(EN)
A defect detection method, comprising: using coherent light sources (11, 12, 13, 14) of different wavelengths to illuminate an object to be inspected; capturing multiple speckle images generated by said object under the illumination of the coherent light sources (11, 12, 13, 14) of different wavelengths; and detecting a defect of said object by means of the speckle images. The beneficial effects are that: the measurement accuracy reaches the level of optical wavelength and micro-defects at a micron level can be detected; a non-contact, high-accuracy, online, and real-time non-destructive detection method is achieved.
(FR)
L'invention concerne un procédé de détection de défaut consistant : à utiliser des sources de lumière cohérente (11, 12, 13, 14) de différentes longueurs d'onde pour éclairer un objet à inspecter ; à capturer de multiples images de granularité générées par ledit objet sous l'éclairage des sources de lumière cohérente (11, 12, 13, 14) de longueurs d'onde différentes ; et à détecter un défaut dudit objet au moyen des images de granularité. Les effets bénéfiques sont que : la précision de mesure atteint le niveau d'une longueur d'onde optique et des micro-défauts à un niveau micrométrique peuvent être détectés ; un procédé de détection non destructive, sans contact, haute précision et en temps réel est obtenu.
(ZH)
一种缺陷检测方法,包括:利用不同波长的相干光源(11、12、13、14)照射被测物体;拍摄被测物体在不同波长的相干光源(11、12、13、14)照射下生成的多幅散斑图像;利用散斑图像检测被测物体的缺陷。有益效果:测量精度达到了光波波长量级,可以检测微米级别的微缺陷,是一种非接触、高精度、在线式、实时性的无损检测方法。
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