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1. WO2020116990 - GRAPHENE COMPOSITE FOR ELECTRON MICROSCOPIC OBSERVATION AND METHOD FOR MANUFACTURING SPECIMEN SUBSTRATE

Publication Number WO/2020/116990
Publication Date 11.06.2020
International Application No. PCT/KR2019/017192
International Filing Date 06.12.2019
IPC
C01B 32/194 2017.01
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
32Carbon; Compounds thereof
15Nanosized carbon materials
182Graphene
194After-treatment
G02B 21/26 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
24Base structure
26Stages; Adjusting means therefor
H01J 37/20 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Applicants
  • 한국화학연구원 KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY [KR]/[KR]
  • 한국과학기술연구원 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY [KR]/[KR]
Inventors
  • 이정오 LEE, Jeong O
  • 정두원 JEONG, Du Won
  • 황준연 HWANG, Jun Yeon
  • 이경은 LEE, Kyung Eun
Agents
  • 특허법인리채 LEECHAE INTELLECTUAL PROPERTY
Priority Data
10-2018-015589406.12.2018KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) GRAPHENE COMPOSITE FOR ELECTRON MICROSCOPIC OBSERVATION AND METHOD FOR MANUFACTURING SPECIMEN SUBSTRATE
(FR) COMPOSITE DE GRAPHÈNE POUR OBSERVATION MICROSCOPIQUE D'ÉLECTRONS ET PROCÉDÉ DE FABRICATION DE SUBSTRAT D'ÉCHANTILLON
(KO) 전자 현미경 관찰용 그래핀 복합체 및 시료 기판의 제조방법
Abstract
(EN)
When used in electron microscopic observation, a graphene composite of the present invention can allow an accurate and clear observation of a specimen to be observed. Particularly, in the case of a graphene composite supported by a support layer consisting of crystalline material, a specimen to be observed can be formed to be crystallized, and, in the case of a graphene composite supported by a support layer consisting of a non-crystalline material, an insulating bio specimen or the like can be accurately and clearly observed, and even a specimen that cannot be mounted on a sole graphene layer can be stably mounted on the graphene composite due to the chemical transparency of graphene.
(FR)
Lorsqu'elle est utilisée dans une observation microscopique d'électrons, un composite de graphène de la présente invention peut permettre une observation précise et nette d'un échantillon à observer. En particulier, dans le cas d'un composite de graphène supporté par une couche de support constituée d'un matériau cristallin, un échantillon à observer peut être formé pour être cristallisé, et, dans le cas d'un composite de graphène supporté par une couche de support constituée d'un matériau non cristallin, un échantillon biologique isolant ou analogue peut être observé de manière précise et nette, et même un échantillon qui ne peut pas être monté sur une seule couche de graphène peut être monté de façon stable sur le composite de graphène du fait de la transparence chimique du graphène.
(KO)
본 발명의 그래핀 복합체를 전자 현미경 관찰에 사용하는 경우, 관찰 대상 시료를 정밀하고 선명하게 관찰할 수 있다. 특히, 결정성 물질로 이루어진 지지층에 의해 지지된 그래핀 복합체의 경우, 관찰 대상 시료를 결정성 있게 형성할 수 있고, 비결정성 물질로 이루어진 지지층에 의해 지지된 그래핀 복합체의 경우, 절연성 있는 바이오 시료 등을 정밀하고 선명하게 관찰할 수 있고, 단독 그래핀층 올려놓을 수 없었던 시료의 경우에도 그래핀의 화학적 투명성으로 인해 안정적으로 올려놓을 수 있는 장점이 있다.
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