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1. WO2020116510 - SUBSTRATE TRANSPORT DEVICE AND OPERATION METHOD FOR SUBSTRATE TRANSPORT DEVICE

Publication Number WO/2020/116510
Publication Date 11.06.2020
International Application No. PCT/JP2019/047417
International Filing Date 04.12.2019
IPC
B25J 13/08 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
13Controls for manipulators
08by means of sensing devices, e.g. viewing or touching devices
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
H01L 21/67 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
Applicants
  • 川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • 斎藤 雅行 SAITO, Masayuki
  • 福島 崇行 FUKUSHIMA, Takayuki
Agents
  • 特許業務法人 有古特許事務所 PATENT CORPORATE BODY ARCO PATENT OFFICE
Priority Data
2018-22971107.12.2018JP
2019-09773124.05.2019JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE TRANSPORT DEVICE AND OPERATION METHOD FOR SUBSTRATE TRANSPORT DEVICE
(FR) DISPOSITIF DE TRANSPORT DE SUBSTRAT ET PROCÉDÉ DE FONCTIONNEMENT DESTINÉ À UN DISPOSITIF DE TRANSPORT DE SUBSTRAT
(JA) 基板搬送装置及びその運転方法
Abstract
(EN)
A substrate transport device 101 that holds and transports a substrate 1. The substrate transport device 101 comprises a hand 20 that holds the substrate 1, a manipulator 30 to which the hand 20 is attached, and a substrate detector 60 that is arranged on the hand 20 and detects the distance to a principal surface of the substrate 1. The substrate detector 60 is preferably arranged at a tip end part of the hand 20. The substrate detector 60 is preferably an electrostatic capacitance sensor.
(FR)
L’invention concerne un dispositif de transport de substrat (101) qui maintient et transporte un substrat (1). Le dispositif de transport de substrat (101) comprend une main (20) qui maintient le substrat (1), un manipulateur (30) auquel est fixée la main (20), et un détecteur de substrat (60) qui est disposé sur la main (20) et détecte la distance à une surface principale du substrat (1). Le détecteur de substrat (60) est de préférence disposé au niveau d'une partie extrémité de pointe de la main (20). Le détecteur de substrat (60) est de préférence un capteur de capacité électrostatique.
(JA)
基板搬送装置101は、基板1を保持して搬送する。この基板搬送装置101は、基板1を保持するハンド20と、ハンド20が取り付けられたマニピュレータ30と、ハンド20に配置されており、基板1の主面までの距離を検知する基板検出器60とを備える。好ましくは、基板検出器60が、ハンド20の先端部に配置されている。好ましくは、基板検出器60は静電容量センサである。
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