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1. WO2020116150 - CONVEYANCE DETECTION METHOD AND SUBSTRATE TREATMENT DEVICE

Publication Number WO/2020/116150
Publication Date 11.06.2020
International Application No. PCT/JP2019/045242
International Filing Date 19.11.2019
IPC
B25J 13/08 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
13Controls for manipulators
08by means of sensing devices, e.g. viewing or touching devices
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
H01L 21/68 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68for positioning, orientation or alignment
CPC
B25J 13/08
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
13Controls for manipulators
08by means of sensing devices, e.g. viewing or touching devices
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
H01L 21/68
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
68for positioning, orientation or alignment
Applicants
  • 東京エレクトロン株式会社 TOKYO ELECTRON LIMITED [JP]/[JP]
Inventors
  • 高橋 明 TAKAHASHI, Akira
  • 河邊 篤 KAWABE, Atsushi
Agents
  • 伊東 忠重 ITOH, Tadashige
  • 伊東 忠彦 ITOH, Tadahiko
Priority Data
2018-22686603.12.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) CONVEYANCE DETECTION METHOD AND SUBSTRATE TREATMENT DEVICE
(FR) PROCÉDÉ DE DÉTECTION DE TRANSPORT ET DISPOSITIF DE TRAITEMENT DE SUBSTRAT
(JA) 搬送検知方法及び基板処理装置
Abstract
(EN)
Provided is a conveyance detection method to be used in a substrate treatment device having a conveyance arm which has a plurality of substrate holding parts and conveys a plurality of substrates in a stack with multiple levels, between a first chamber and a second chamber adjacent to the first chamber by using the substrate holding parts and having an optical sensor which is provided near an opening that connects the first and second chambers with each other, the method comprising: a step for projecting light having a horizontal-direction optical axis parallel to the opening, to a position through which the substrates held by the substrate holding parts pass; and a step for determining at least one of the states of the conveyance arm and the substrates on the substrate holding parts, in accordance with the result of detecting the light projected from the optical sensor.
(FR)
L'invention concerne un procédé de détection de transport destiné à être utilisé dans un dispositif de traitement de substrat ayant un bras de transport qui a une pluralité de parties de support de substrat et qui transporte une pluralité de substrats sous la forme d'un empilement avec de multiples niveaux entre une première chambre et une seconde chambre adjacente à la première chambre à l'aide des parties de support de substrat, et ayant un capteur optique qui est disposé à proximité d'une ouverture qui relie les première et seconde chambres l'une à l'autre, lequel procédé comprend : une étape de projection d'une lumière ayant un axe optique de direction horizontale parallèle à l'ouverture, vers une position à travers laquelle passent les substrats supportés par les parties de support de substrat ; et une étape de détermination d'au moins l'un des états du bras de transport et des substrats sur les parties de support de substrat, en fonction du résultat de détection de la lumière projetée à partir du capteur optique.
(JA)
複数の基板保持部を有し、前記複数の基板保持部を用いて第1室と前記第1室に隣接する第2室との間にて複数の基板を複数段に搬送する搬送アームと、前記第1室と前記第2室とを連通する開口部の近傍に設けられた光センサと、を有する基板処理装置における搬送検知方法であって、前記開口部に平行な水平方向の光軸を持つ光を、前記複数の基板保持部に保持された基板が通過する位置に投光する工程と、前記光センサが投光した前記光を検知した結果に応じて、前記基板保持部の上の基板及び前記搬送アームの状態の少なくともいずれかを判定する工程と、を有する搬送検知方法が提供される。
Also published as
Latest bibliographic data on file with the International Bureau