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1. WO2020115870 - CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES

Publication Number WO/2020/115870
Publication Date 11.06.2020
International Application No. PCT/JP2018/044950
International Filing Date 06.12.2018
IPC
C04B 35/119 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
01based on oxides
10based on aluminium oxide
111Fine ceramics
117Composites
119with zirconium oxide
H01L 23/15 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
23Details of semiconductor or other solid state devices
12Mountings, e.g. non-detachable insulating substrates
14characterised by the material or its electrical properties
15Ceramic or glass substrates
Applicants
  • 日本碍子株式会社 NGK INSULATORS, LTD. [JP]/[JP]
  • NGKエレクトロデバイス株式会社 NGK ELECTRONICS DEVICES, INC. [JP]/[JP]
Inventors
  • 梅田 勇治 UMEDA, Yuji
  • 河野 浩 KOUNO, Hiroshi
Agents
  • 新樹グローバル・アイピー特許業務法人 SHINJYU GLOBAL IP
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICES
(FR) CORPS FRITTÉ EN CÉRAMIQUE ET SUBSTRAT POUR DISPOSITIFS SEMICONDUCTEURS
(JA) セラミックス焼結体及び半導体装置用基板
Abstract
(EN)
A ceramic sintered body (3) according to the present invention contains Zr, Al, Y and Mg; the content of Zr is from 7.5% by mass to 23.5% by mass (inclusive) in terms of ZrO2; the content of Al is from 74.9% by mass to 91.8% by mass (inclusive) in terms of Al2O3; the content of Y is from 0.41% by mass to 1.58% by mass (inclusive) in terms of Y2O3; and the content of Mg is from 0.10% by mass to 0.80% by mass (inclusive) in terms of MgO. The M-phase ratio after thermal aging of the ceramic sintered body (3) is 15% or less.
(FR)
Un corps fritté en céramique (3) selon la présente invention contient du Zr, de l'Al, du Y et du Mg ; la teneur en Zr varie de 7,5 % en masse à 23,5 % en masse (bornes incluses) en termes de ZrO2 ; la teneur en Al varie de 74,9 % en masse à 91,8 % en masse (bornes incluses) en termes d'Al2O3 ; la teneur en Y varie de 0,41 % en masse à 1,58 % en masse (bornes incluses) en termes de Y2O3 ; et la teneur en Mg varie de 0,10 % en masse à 0,80 % en masse (bornes inclus) en termes de MgO. La proportion de phase M après vieillissement thermique du corps fritté en céramique (3) est inférieure ou égale à 15 %.
(JA)
セラミックス焼結体(3)は、Zrと、Alと、Yと、Mgとを含み、Zrの含有量は、ZrO換算で7.5質量%以上23.5質量%以下であり、Alの含有量は、Al換算で74.9質量%以上91.8質量%以下であり、Yの含有量は、Y換算で0.41質量%以上1.58質量%以下であり、Mgの含有量は、MgO換算で0.10質量%以上0.80質量%以下である。セラミックス焼結体(3)の熱エージング後M相率は、15%以下である。
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