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1. WO2020115825 - CHARGED PARTICLE SOURCE AND CHARGED PARTICLE BEAM DEVICE

Publication Number WO/2020/115825
Publication Date 11.06.2020
International Application No. PCT/JP2018/044634
International Filing Date 05.12.2018
IPC
H01J 1/304 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02Main electrodes
30Cold cathodes
304Field-emissive cathodes
H01J 9/02 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
9Apparatus or processes specially adapted for the manufacture of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
02Manufacture of electrodes or electrode systems
H01J 37/06 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06Electron sources; Electron guns
H01J 37/073 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06Electron sources; Electron guns
073Electron guns using field emission, photo emission, or secondary emission electron sources
CPC
H01J 1/304
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02Main electrodes
30Cold cathodes, e.g. field-emissive cathode
304Field-emissive cathodes
H01J 37/06
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06Electron sources; Electron guns
H01J 37/073
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06Electron sources; Electron guns
073Electron guns using field emission, photo emission, or secondary emission electron sources
H01J 9/02
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
9Apparatus or processes specially adapted for the manufacture, ; installation, removal, maintenance; of electric discharge tubes, discharge lamps, or parts thereof
02Manufacture of electrodes or electrode systems
Applicants
  • 株式会社日立ハイテク HITACHI HIGH-TECH CORPORATION [JP]/[JP]
Inventors
  • 福田 真大 FUKUTA Masahiro
  • 本田 和広 HONDA Kazuhiro
Agents
  • 特許業務法人平木国際特許事務所 HIRAKI & ASSOCIATES
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) CHARGED PARTICLE SOURCE AND CHARGED PARTICLE BEAM DEVICE
(FR) SOURCE DE PARTICULES CHARGÉES ET DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES
(JA) 荷電粒子源、荷電粒子線装置
Abstract
(EN)
The purpose of the present invention is to provide a charged particle source that exhibits small energy dispersion for charged particle beams emitted under a high angular current density condition and allows stable acquisition of large charged particle currents even for a small light source diameter. A charged particle source according to the present invention has a spherical virtual cathode surface from which charged particles are emitted, and the virtual cathode surface for charged particles emitted from a first position on the tip end surface of an emitter and the virtual cathode surface for charged particles emitted from a second position on the tip end surface of the emitter match each other (See Fig. 4).
(FR)
L'objet de la présente invention est de mettre en œuvre une source de particules chargées qui présente une faible dispersion d'énergie pour des faisceaux de particules chargées émis dans une condition de densité de courant angulaire élevée et qui permet l'acquisition stable de forts courants de particules chargées même pour un petit diamètre de source de lumière. Une source de particules chargées selon la présente invention a une surface de cathode virtuelle sphérique depuis laquelle des particules chargées sont émises, et la surface de cathode virtuelle pour des particules chargées émises depuis une première position sur la surface d'extrémité de pointe d'un émetteur et la surface de cathode virtuelle pour des particules chargées émises depuis une deuxième position sur la surface d'extrémité de pointe de l'émetteur se correspondent (voir Fig. 4).
(JA)
本発明は、高角電流密度条件においても、放出される荷電粒子ビームのエネルギー分散が小さく、小さい光源径であっても安定して大きな荷電粒子電流を得ることができる荷電粒子源を提供することを目的とする。本発明に係る荷電粒子源は、荷電粒子が出射する仮想陰極面が球面形状を有しており、エミッタ先端表面の第1位置から放出される荷電粒子の仮想陰極面と、前記エミッタ先端表面の第2位置から放出される荷電粒子の仮想陰極面とが一致する(図4参照)。
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