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1. WO2020115739 - NANOCOMPOSITE GRAPHENE POLYMER MEMBRANE ASSEMBLY, AND MANUFACTURING METHOD THEREOF

Publication Number WO/2020/115739
Publication Date 11.06.2020
International Application No. PCT/IL2019/051319
International Filing Date 01.12.2019
IPC
H04R 7/10 2006.01
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
7Diaphragms for electromechanical transducers; Cones
02characterised by the construction
04Plane diaphragms
06comprising a plurality of sections or layers
10comprising superposed layers in contact
CPC
B81B 2201/0257
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
02Sensors
0257Microphones or microspeakers
B81B 2203/0127
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
01Suspended structures, i.e. structures allowing a movement
0127Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
B81B 3/0021
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
0021Transducers for transforming electrical into mechanical energy or vice versa
B81C 1/00158
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
00015for manufacturing microsystems
00134comprising flexible or deformable structures
00158Diaphragms, membranes
B81C 2201/0176
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
2201Manufacture or treatment of microstructural devices or systems
01in or on a substrate
0174for making multi-layered devices, film deposition or growing
0176Chemical vapour Deposition
B81C 2203/032
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
2203Forming microstructural systems
03Bonding two components
032Gluing
Applicants
  • WAVES AUDIO LTD. [IL]/[IL]
  • VIRGINIA TECH INTELLECTUAL PROPERTIES, INC. [US]/[US]
  • BAR-ILAN UNIVERSITY [IL]/[IL]
Inventors
  • ZELTZER, Gabriel
  • SPEYER, Gavriel
  • SHAASHUA, Meir
  • ARTEL, Vlada
  • LEVI, Adi
  • NAVEH, Doron
  • KHAN, Assad U.
  • GUO, Yichen
  • LIU, Guoliang
Agents
  • FARBER, Hanan
Priority Data
16/211,92606.12.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) NANOCOMPOSITE GRAPHENE POLYMER MEMBRANE ASSEMBLY, AND MANUFACTURING METHOD THEREOF
(FR) ENSEMBLE DE MEMBRANE POLYMÈRE DE GRAPHÈNE NANOCOMPOSITE ET SON PROCÉDÉ DE FABRICATION
Abstract
(EN)
A membrane hetero-structure includes a polymer layer and a single-layer or multi-layer graphene sheet disposed on the polymer layer. The membrane hetero-structure is tensioned across a frame having an opening such that both the polymer layer and the graphene sheet extend across the opening. The assembly of the frame and membrane hetero-structure may form an electrostatically driven micro-electro-mechanical system (MEMS) for sound generation and/or recording. In one instance, when a voltage signal is applied between an electrode layer parallel to the membrane and contacts on the frame that are electrically connected to the graphene sheet, the membrane hetero-structure is actuated.
(FR)
La présente invention concerne une hétéro-structure de membrane comprenant une couche polymère et une feuille de graphène monocouche ou multicouche disposée sur la couche polymère. L'hétéro-structure de membrane est tendue à travers un cadre ayant une ouverture de telle sorte que à la fois la couche polymère et la feuille de graphène s'étendent à travers l'ouverture. L'ensemble du cadre et de la structure hétéro-structure de membrane peut former un système micro-électromécanique (MEMS) à entraînement électrostatique pour la génération et/ou l'enregistrement de sons. Dans un exemple, lorsqu'un signal de tension est appliqué entre une couche d'électrode parallèle à la membrane et des contacts sur le cadre qui sont électriquement connectés à la feuille de graphène, l'hétéro-structure de membrane est actionnée.
Also published as
Latest bibliographic data on file with the International Bureau