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1. WO2020113849 - EVAPORATION CAVITY STRUCTURE AND BAFFLE PLATE STRUCTURE

Publication Number WO/2020/113849
Publication Date 11.06.2020
International Application No. PCT/CN2019/078518
International Filing Date 18.03.2019
IPC
C23C 14/24 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
CPC
C23C 14/24
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
Applicants
  • 武汉华星光电半导体显示技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. [CN]/[CN]
Inventors
  • 徐超 XU, Chao
Agents
  • 深圳翼盛智成知识产权事务所(普通合伙) ESSEN PATENT & TRADEMARK AGENCY
Priority Data
201811479218.405.12.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) EVAPORATION CAVITY STRUCTURE AND BAFFLE PLATE STRUCTURE
(FR) STRUCTURE DE CAVITÉ D'ÉVAPORATION ET STRUCTURE DE PLAQUE DÉFLECTRICE
(ZH) 蒸镀腔结构及遮挡板结构
Abstract
(EN)
Disclosed is an evaporation cavity structure, comprising a cavity (30), a material nozzle (32), and a structure of a baffle plate (300). The material nozzle (32) is located in a lower portion inside the cavity (30), and is used for spraying a raw material that is used for plating onto a substrate (34) to be plated. The baffle plate (300) comprises a supporting portion (360), several supporting strips (340), and multiple auxiliary baffle plates (320). The multiple auxiliary baffle plates (320) are located between the supporting strips (340), and the multiple auxiliary baffle plates (320) are collapsed for folding or unfolded for covering by means of the supporting strips (340). The structure of the baffle plate (300) is further comprised.
(FR)
L'invention concerne une structure de cavité d'évaporation, comprenant une cavité (30), une buse de matériau (32) et une structure d'une plaque déflectrice (300). La buse de matériau (32) est située dans une partie inférieure à l'intérieur de la cavité (30) et est utilisée pour pulvériser une matière première qui est utilisée pour un placage sur un substrat (34) devant être plaqué. La plaque déflectrice (300) comprend une partie de support (360), plusieurs bandes de support (340) et de multiples plaques déflectrices auxiliaires (320). Les multiples plaques déflectrices auxiliaires (320) sont situées entre les bandes de support (340) et les multiples plaques déflectrices auxiliaires (320) sont repliées pour le repliement ou dépliées pour le recouvrement au moyen des bandes de support (340). La structure de la plaque déflectrice (300) est en outre comprise.
(ZH)
一种蒸镀腔结构,包含腔体(30)、材料喷嘴(32)以及遮挡板(300)结构。材料喷嘴(32)位于所述腔体(30)内部下方,用来喷出欲镀原料至待镀基板(34)。遮挡板(300)包含支撑部(360)、数个支撑条(340)以及数个副遮挡板(320)。数个副遮挡板(320)位于支撑条(340)之间,数个副遮挡板(320)通过支撑条(340)收合重叠或展开覆盖。还包括一种遮挡板(300)结构。
Also published as
Latest bibliographic data on file with the International Bureau