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1. WO2020113664 - INTEGRATED SUPER-RESOLUTION LASER DIRECT-WRITING DEVICE AND DIRECT-WRITING METHOD

Publication Number WO/2020/113664
Publication Date 11.06.2020
International Application No. PCT/CN2018/121449
International Filing Date 17.12.2018
IPC
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
G03F 7/2053
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
2051Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
2053using a laser
Applicants
  • 中国科学院上海光学精密机械研究所 SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS CHINESE ACADEMY OF SCIENCES [CN]/[CN]
Inventors
  • 曾爱军 ZENG, Ai Jun
  • 刘铁诚 LIU, Tie Cheng
  • 胡敬佩 HU, Jing Pei
  • 朱玲琳 ZHU, Ling Lin
  • 黄惠杰 HUANG, Hui Jie
Agents
  • 上海恒慧知识产权代理事务所(特殊普通合伙) SHANGHAI HENGHUI INTELLECTUAL PROPERTY AGENCY
Priority Data
201811473633.904.12.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) INTEGRATED SUPER-RESOLUTION LASER DIRECT-WRITING DEVICE AND DIRECT-WRITING METHOD
(FR) DISPOSITIF D'ÉCRITURE DIRECTE AU LASER À SUPER-RÉSOLUTION INTÉGRÉE ET PROCÉDÉ D'ÉCRITURE DIRECTE
(ZH) 集成化超分辨激光直写装置及直写方法
Abstract
(EN)
An integrated super-resolution laser direct writing device and a direct writing method, the device comprises a continuous laser (1), a first optical fiber coupler (2), single-mode optical fibers (3), a second continuous laser (4), a second optical fiber coupler (5), first annular photonic crystal fibers (6), split fibers (7), a lens group (8), a first dichroic mirror (9), an LED light source (10), a lens (11), a second dichroic mirror (12), an automatic focusing module (13), a third dichroic mirror (14), a third optical fiber coupler (15), square-rate gradient fibers (16), a nano displacement table (17), a second lens (18), a CMOS camera (19) and a control system (20). The device implements the optical fiberization and system integration of key components, and can be better applied to the laser direct writing field.
(FR)
La présente invention concerne un dispositif d'écriture directe au laser à super-résolution intégrée et un procédé d'écriture directe, le dispositif comprenant un laser continu (1), un premier coupleur de fibres optiques (2), des fibres optiques monomodes (3), un second laser continu (4), un second coupleur de fibres optiques (5), des premières fibres de cristal photonique annulaires (6), des fibres fendues (7), un groupe de lentilles (8), un premier miroir dichroïque (9), une source de lumière à DEL (10), une lentille (11), un second miroir dichroïque (12), un module de mise au point automatique (13), un troisième miroir dichroïque (14), un troisième coupleur de fibres optiques (15), des fibres de gradient à vitesse carrée (16), une table de nano-déplacement (17), une deuxième lentille (18), une caméra CMOS (19) et un système de commande (20). Le dispositif met en application la fibre optique et l'intégration système de composants clés, et il peut être mieux appliqué au champ de l'écriture directe au laser.
(ZH)
一种集成化超分辨激光直写装置以及直写方法,该装置包括连续激光器(1)、第一光纤耦合器(2)、单模光纤(3)、第二连续激光器(4)、第二光纤耦合器(5)、第一环形光子晶体光纤(6)、分叉光纤(7)、透镜组(8)、第一二向色镜(9)、LED光源(10)、透镜(11)、第二二向色镜(12)、自动聚焦模块(13)、第三二向色镜(14)、第三光纤耦合器(15)、平方率渐变光纤(16)、纳米位移台(17)、第二透镜(18)、CMOS相机(19)和控制系统(20)。该装置实现了关键器件光纤化和系统集成化,能更好的应用于激光直写领域。
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