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1. WO2020113205 - RINSE - REMOVAL OF INCUBATED NANOTUBES THROUGH SELECTIVE EXFOLIATION

Publication Number WO/2020/113205
Publication Date 04.06.2020
International Application No. PCT/US2019/063932
International Filing Date 02.12.2019
IPC
G01N 27/12 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating impedance
04by investigating resistance
12of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid
G01N 27/414 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
403Cells and electrode assemblies
414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
G01N 33/543 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
33Investigating or analysing materials by specific methods not covered by groups G01N1/-G01N31/131
48Biological material, e.g. blood, urine; Haemocytometers
50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
53Immunoassay; Biospecific binding assay; Materials therefor
543with an insoluble carrier for immobilising immunochemicals
CPC
G01N 33/543
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
33Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
48Biological material, e.g. blood, urine
50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
53Immunoassay; Biospecific binding assay; Materials therefor
543with an insoluble carrier for immobilising immunochemicals
Applicants
  • MASSACHUSETTS INSTITUTE OF TECHNOLOGY [US]/[US]
  • LAU, Christian [US]/[US] (US)
  • SHULAKER, Max [US]/[US] (US)
Inventors
  • LAU, Christian
  • SHULAKER, Max
Agents
  • SUD, Dhruv
  • TEJA, Joseph
  • COLICE, Christopher, Max
Priority Data
62/773,41930.11.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) RINSE - REMOVAL OF INCUBATED NANOTUBES THROUGH SELECTIVE EXFOLIATION
(FR) RINSE - ÉLIMINATION DE NANOTUBES INCUBÉS PAR EXFOLIATION SÉLECTIVE
Abstract
(EN)
A technology called RINSE (Removal of Incubated Nanotubes through Selective Exfoliation) is demonstrated. RINSE removes carbon nanotube (CNT) aggregates in CNFETs without compromising CNFET performance. In RINSE, CNTs are deposited on a substrate, coated with a thin adhesive layer, and sonicated. The adhesive layer is strong enough to keep the individual CNTs on the substrate, but not the larger CNT aggregates. When combined with a CNFET CMOS process as disclosed here, record CNFET CMOS yield and uniformity can be realized.
(FR)
L'invention concerne une technologie appelée RINSE (élimination de nanotubes incubés par exfoliation sélective). RINSE permet d'éliminer les agrégats de nanotubes de carbone (CNT) dans des CNFET sans compromettre les performances du CNFET. Avec RINSE, des CNT sont déposés sur un substrat, revêtus d'une couche adhésive mince, et soniqués. La couche adhésive est suffisamment forte pour maintenir les CNT individuels sur le substrat, mais pas les agrégats de CNT plus grands. Lorsqu'il est combiné à un processus CNFET CMOS selon la présente invention, un rendement et une uniformité CNFET CMOS d'enregistrement peuvent être obtenus.
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