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International application No. Applicant's or agent's file reference
PCT/US2019/063478 P5428-PCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
27 November 2019 30 November 2018
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing filed or furnished:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
none of the figures is to be published with the abstract.


     H01L 21/66 (2006.01)i; H01L 21/67 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC


Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & keywords: distinguish, defects of interest, nuisance defects, point-spread function


Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
US 2016-0180513 A1 (SAMSUNG ELECTRONICS CO., LTD.) 23 June 2016 paragraph [0084], claim 1 and figures 2-3B
WO 2017-117152 A1 (KLA-TENCOR CORPORATION) 06 July 2017 paragraphs [0038]-[0072], claim 18 and figures 2, 11
US 2015-0356719 A9 (APPLIED MATERIALS ISRAEL LTD.) 10 December 2015 paragraphs [0039]-[0070] and figures 1-3
US 7728969 B2 (JASON SAITO et al.) 01 June 2010 the entire document
KR 10-2011-0048528 A (KLA-TENCOR CORPORATION) 11 May 2011 the entire document
Special categories of cited documents:
document defining the general state of the art which is not considered to be of particular relevance
document cited by the applicant in the international application
earlier application or patent but published on or after the international filing date
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
document referring to an oral disclosure, use, exhibition or other means
document published prior to the international filing date but later than the priority date claimed
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
document member of the same patent family


Patent document cited in search report Publication date
Patent family member(s) Publication date
US 2016-0180513 A1
23 June 2016
KR 10-2016-0076310 A
US 9727799 B2
30 June 2016
08 August 2017
WO 2017-117152 A1
06 July 2017
CN 108431938 A
KR 10-2018-0090382 A
TW 201734441 A
US 10416087 B2
US 2017-0191945 A1
21 August 2018
10 August 2018
01 October 2017
17 September 2019
06 July 2017
US 2015-0356719 A9
10 December 2015
JP 2013-162133 A
JP 6197228 B2
KR 10-1897582 B1
KR 10-2013-0090382 A
TW 201339778 A
TW I574136 B
US 2014-0212022 A1
US 9401013 B2
19 August 2013
20 September 2017
12 September 2018
13 August 2013
01 October 2013
11 March 2017
31 July 2014
26 July 2016
US 7728969 B2
01 June 2010
US 2008-0129988 A1
WO 2008-070722 A2
WO 2008-070722 A3
05 June 2008
12 June 2008
31 July 2008
KR 10-2011-0048528 A
11 May 2011
JP 2011-529274 A
JP 2015-215352 A
JP 5769623 B2
JP 6141353 B2
KR 10-1608695 B1
US 2010-0060888 A1
US 8269960 B2
WO 2010-011578 A2
WO 2010-011578 A3
01 December 2011
03 December 2015
26 August 2015
07 June 2017
04 April 2016
11 March 2010
18 September 2012
28 January 2010
22 April 2010
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
20 March 2020
Date of mailing of the international search report:
20 March 2020
Authorized officer:
PARK, Hye Lyun
Telephone No. +82-42-481-3463
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