Processing

Please wait...

Settings

Settings

Goto Application

1. WO2020112858 - LOW DRIFT SYSTEM FOR A METROLOGY INSTRUMENT

Publication Number WO/2020/112858
Publication Date 04.06.2020
International Application No. PCT/US2019/063380
International Filing Date 26.11.2019
IPC
G01Q 30/10 2010.01
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
08Means for establishing or regulating a desired environmental condition within a sample chamber
10Thermal environment
G01Q 70/04 2010.01
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
70General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/196
02Probe holders
04with compensation for temperature or vibration induced errors
CPC
G01Q 20/02
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
20Monitoring the movement or position of the probe
02by optical means
G01Q 30/06
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
04Display or data processing devices
06for error compensation
G01Q 30/10
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
08Means for establishing or regulating a desired environmental condition within a sample chamber
10Thermal environment
Applicants
  • BRUKER NANO, INC. [US]/[US]
Inventors
  • NEUSHUL, Andrew
  • RUITER, Anthonius
Agents
  • DURST, Jay, G.
Priority Data
62/771,47326.11.2018US
62/771,97827.11.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) LOW DRIFT SYSTEM FOR A METROLOGY INSTRUMENT
(FR) SYSTÈME À FAIBLE DÉRIVE POUR INSTRUMENT DE MÉTROLOGIE
Abstract
(EN)
The present inventors have recognized that more accurate measurements can be taken with less drift due to thermal expansion by precisely controlling insulated heating and cooling modules abutting one another in substantial alignment to rapidly heat a sample to be scanned by a Scanning Probe Microscope (SPM) with minimal temperature variation. The heating and cooling modules can be "flat-packed," with parallel surfaces of each module in contact with one another, to more efficiently heat a sample that is positioned in axial alignment with the heating and cooling modules. This can allow heating the sample to at least 250 degrees Celsius in less than 5 seconds, continuously maintaining a temperature of the sample to within ±.001 degree Celsius, and maintaining a drift of less than 0.1 nanometers per minute in the z direction.
(FR)
Les présents inventeurs ont découvert que des mesures plus précises peuvent être prises avec moins de dérive due à la dilatation thermique en réglant avec précision des modules de chauffage et de refroidissement isolés venant en butée les uns contre les autres dans un alignement substantiel pour chauffer rapidement un échantillon devant être balayé par un microscope en champ proche (SPM) avec une variation de température minimale. Les modules de chauffage et de refroidissement peuvent être "à boîtier plat", les surfaces parallèles de chaque module étant en contact les unes avec les autres, pour chauffer plus efficacement un échantillon qui est positionné en alignement axial avec les modules de chauffage et de refroidissement. Ceci peut permettre le chauffage de l'échantillon à au moins 250 degrés Celsius en moins de 5 secondes, le maintien en continu d'une température de l'échantillon à ±0,001 degré Celsius, et le maintien d'une dérive inférieure à 0,1 nanomètre par minute dans la direction z.
Latest bibliographic data on file with the International Bureau